超高速(~300GHz)光偵測器的製造與其在毫米波生物晶片上的應用

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彭思瑋(Sui-wei Peng) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

超高速(~300GHz)光偵測器的製造與其在毫米波生物晶片上的應用
(The Demonstration of Ultra-High Speed (~300GHz) Near Ballistic Uni-Traveling-Carrier Photodiode and its Applications of the Photonic-MMW Bio-Chip)

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摘要(中)

由於毫米波與次毫米波輻射已被普遍應用且商業化，致使我們越發想了解此波段除了應用在無線通訊、安全監控，甚至在軍事武器外，其所輻射出的長波長能量對生物細胞能否有重要的治療功效，如刺激活化細胞或抑制疼痛神經等等。然而，大部分探討毫米波對生物影響的研究的實驗架構有弊病存在，其一即供應毫米波之機制非常龐大且易造成儀器連結上的訊號損耗，其二為傳統提供毫米波之生物實驗裝置僅能提供單一頻率的毫米波輻射，當探討不同頻率對生物體之不同影響時會造成很大的麻煩。為了解決這些問題，本文利用一項光科技技術：將超高速(~300 GHz)近彈道單載子傳輸光二極體與輻射毫米波之偶極天線耦合在利於觀測螢光反應的生物晶片上，此架構實現了寬頻(75~200 GHz)毫米波輻射且因積體化故達到低損耗之便於觀測螢光反應的生物晶片。

摘要(英)

As the application and commercial use of millimeter- and sub-millimeter wavelength radiation become more widespread, there is a growing need to understand both the coupling systems and the impact of this long wavelength energy on biological tissues. However most of the millimeter wave components used for bio-experiment is very bulky with huge loss for interconnection. Moreover, the maximum available bandwidth of these components is usually limited, which may cause troubles in investigating the bio-organisms with un-known interesting MMW bands. In order to solve above problems, ultra-high speed (~300 GHz) near ballistic uni-traveling carrier photodiode based bio-chip with ultra-wide MMW operation bandwidth are designed and demonstrated in this paper. By using photonic technology, the wide- band (75-200 GHz) radiation and low interconnection loss bio-chip demonstration is
realized for MMW nanoporation.

關鍵字(中)

★ 毫米波
★ 近彈道單載子傳輸光二極體
★ 毫米波生物晶片

關鍵字(英)

★ Millimeter Waves
★ NBUTC-Photodiode
★ Bio-chip

論文目次

目錄
摘要 i
Abstract ii
誌謝 vi
目錄 vi
圖目錄 viii
表目錄 xiii
第一章序論 1
1.1基因治療 1
1.2電脈衝穿孔與奈秒電脈衝穿孔 5
1.3毫米波對於細胞的影響 10
1.4實驗動機與論文架構概述 15
第二章毫米波生物晶片設計與超高速(~300 GHz)近彈道單載
子傳輸光偵測器原理 16
2.1毫米波生物晶片 16
2.2短偶極天線設計 19
2.3超高速(~300 GHz)近彈道單載子傳輸光二極體(NBUTC-PD)之操作理 29
第三章超高速(~300 GHz)近彈道單載子光二極體(NBUTC-PD)製程步驟與毫米波生物晶片製作 37
3.1超高速(~300 GHz)近彈道單載子光二極體(NBUTC-PD)製程 31
3.2毫米波生物晶片製作 54
3.3元件與傳輸線基板結合 58
第四章量測與結果討論 60
4.1 Heterodyne-Beating 量測系統之架設 60
4.2近彈道單載子光二極體(NBUTC-PD)頻寬量測結果 62
4.3毫米波生物晶片頻寬量測結果 69
第五章結論與未來研究方向 72
參考文獻 74

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指導教授

許晉瑋(Jin-wei Shi)

審核日期

2012-10-9

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