次波長週期性結構對抗反射膜片特性探討

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姓名

鄭語成(Cheng-yu Cheng) 查詢紙本館藏

畢業系所

光機電工程研究所

論文名稱

次波長週期性結構對抗反射膜片特性探討

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摘要(中)

次波長週期性微結構被廣泛的應用在抗反射膜片，可大幅降低光學表面反射率，有效達到抗反射之目的。本研究利用有限時域差分法(FDTD)之演算，設計並分析模擬電磁波在各種複合式的次波長週期性微結構中傳遞的物理現象，模擬的波段設定在400nm – 800nm，約略為可見光的範圍。在此新的複合式微結構下，光波的反射率有明顯的下降，對照以往文獻中提到的單一圓柱陣列或金字塔型陣列之抗反射微結構，約改善39% - 57 %，並經由空間密度的概念分析反射率高低之成因，在各種不同結構中提供最佳比例以增加抗反射之效率。

摘要(英)

Based on finite difference time domain method, an optical film surface with subwavelength periodic structure is numerically investigated to improve antireflection property. A improved subwavelength periodic structure is designed by finite difference time domain method, and it can be simulated effective. The antireflection properties of new types of subwavelength structures with different aspect ratios in spectral range of 400–800 nm are analyzed and compared. It is shown that, for the mixing type, the average reflectance is decreased and the variances of the reflectance are evidently smaller. When use the improved structure with a better aspect ratio, the average reflectance of the surface can be improved from 39% ~57%. Obviously, the antireflection properties of the optical film surface with new subwavelength structures can be improved.

關鍵字(中)

★ 次波長結構
★ 抗反射
★ 有限時域差分法
★ 完美吸收層
★ 最密堆積

關鍵字(英)

★ Finite difference time domain
★ Subwavelength structure
★ antireflectance
★ Perfect matched layer

論文目次

目錄
摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 VI
表目錄 VIII
第一章緒論 1
1.1 研究背景、動機與目的 1
1.2 文獻回顧 7
1.2.1 次波長微結構的模擬方法 8
1.2.2 次波長微結構的製造技術 11
1.3 論文架構 14
第二章抗反射相關理論與模擬方法 15
2.1 各種模擬電磁波傳遞的方法介紹 15
2.2 有限時域差分法 16
2.2.1 馬克斯威爾方程式 16
2.2.2 FDTD方程式 17
2.2.3 三維FDTD形式 18
2.2.4 邊界條件 19
2.2.5 波源 22
第三章一種新型的圓柱複合型結構 24
3.1 模擬參數設定 25
3.2 模擬結構 26
3.3 模擬結果分析與討論 28
第四章空間密度與反射率之間的關係 33
4.1 最密堆積概念下的次波長週期性微結構 33
4.1.1 模擬參數設定 34
4.1.2 模擬結構 34
4.1.3 模擬結果分析與討論 36
4.2 分析空間密度與反射率之間關係 47
4.2.1 模擬金字塔型與圓柱型結構 47
4.2.2 分析金字塔型與圓柱型結構空間密度關係 52
4.2.3 圓柱型中間補足結構空間密度分析 57
第五章結論與未來展望 61
5.1 結論 61
5.2 未來展望 61
參考文獻 62

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指導教授

陳奇夆

審核日期

2013-7-29

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