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姓名 陳智堯(Chih-yao Chen) 查詢紙本館藏 畢業系所 材料科學與工程研究所 論文名稱 以電流控制方式快速製備孔洞間距400至500奈米之陽極氧化鋁模板
(Fast fabrication of ordered porous alumina membranes in the 400-500 nm pore interval range by current control method)相關論文 檔案 [Endnote RIS 格式]
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摘要(中) 利用奈米模板來製備低維度奈米材料是一種具有潛力的方式,且無需要使用昂貴的顯影製程設備,即可將奈米陣列轉移至基板上,其中,陽極氧化鋁(AAO)膜是最有吸引力製備奈米孔徑的材料,由於其高度有序結構、高孔洞密度和孔徑可調整等特性質,這使得陽極氧化鋁具有相當大的潛力於各式各樣的應用中。在陽極氧化過程中,所施加的電壓與陽極氧化鋁所形成的孔洞間距和孔徑大小成線性關係,在以往的固定電壓方式中,在外加偏壓150〜195 V,可製備具有大孔洞間距約為300〜500 nm的陽極氧化鋁模板,但當外加的電壓超過180 V時,會發生大量電流集中在缺陷、氧化層較薄弱領域,這將造成氧化層結構遭到破壞,此種狀況稱之為自燃(burning)現象。
在本研究中,成功利用控制電流方式避免自燃(burning)現象的發生,在磷酸溶液中製備孔徑可達400 nm至500 nm的陽極氧化鋁模板,從實驗結果中,可將電流提升至6.5 mA,而其成長速率每小時可達6 μm以上,完全避免在固定電壓方式下當電壓超過180 V造成的自燃(burning)現象,並在反應時間7 h內其可達大範圍程度有序結構摘要(英) Nanosize templates are a low-cost and promising approach for deposition of low-dimensional nanomaterials or transfer of nanopatterns onto a substrate without using costly lithography equipments. Among them, anodic aluminum oxide (AAO) membrane is one of the most attractive nanopore materials due to its highly ordered structure, high pore density and tunable pore size, which make them potentially for a variety of applications. The pore size and interpore distance of AAO membranes are linearly dependent on the applied voltage during the anodization process. In the conventional constant voltage method, the AAO membranes with a large interpore spacing of 300~500 nm could be obtained using an anodizing voltage of 150~195 V. When applying a high voltage over 180 V, however, the burning phenomenon, which would cause structural damages, usually appears owing to the high current flows concentrated at the some weak areas.
In this study, The AAO membranes were fabricated through an anodization procedure in phosphoric acid (H3PO4) solution. A current-controlled method has been developed for fabrication of AAO membranes with a large pore interval in order to avoid the burning phenomenon. From the experimental results, the average growth rate of AAO membranes could increase up to 6 μm/hr with an applied current density of 6 mA/cm2 and the burning phenomenon could be totally avoided at a relatively high anodizing voltage of 192 V. The effect of current density on the growth rate and burning phenomenon was also investigated.關鍵字(中) ★ 陽極氧化鋁模板
★ 自燃(Burning)現象
★ 規則排列結構關鍵字(英) ★ anodic aluminum oxide (AAO) membrane
★ burning phenomenon
★ highly ordered structure論文目次 摘要 I
Abstract II
誌謝 III
目錄 IV
圖目錄 VII
表目錄 X
第一章 緒論 1
第二章 文獻回顧 2
2.1 陽極氧化鋁 2
2.2 多孔性陽極氧化鋁成長機制 3
2.2.1孔洞的生成 4
2.2.2穩定成長 5
2.3 製備多孔性陽極氧化鋁成長之參數 6
2.3.1電壓對陽極氧化鋁之影響 6
2.3.2 電解液及其濃度對於多孔性氧化鋁之影響 7
2.3.3 溫度對於多孔性氧化鋁之影響 8
2.4 多孔性陽極氧化鋁之自燃(Burning)現象 8
2.5避免burning現象之方法 10
2.5.1低溫下製備陽極氧化鋁結構 10
2.5.2電解液加入添加劑 11
2.5.3多階段方式製備大孔徑陽極氧化鋁結構 12
第三章 實驗方法與流程 13
3.1 實驗流程 13
3.2 實驗材料 13
3.3 實驗設備 14
3.4 實驗步驟 14
3.4.1 樣品基材 14
3.4.2 電解拋光 15
3.4.3 陽極處理 15
3.4.4 移除氧化鋁 16
3.4.5 塗佈指甲油 17
3.4.6 移除金屬鋁、背部障壁層 17
第四章 結果與討論 18
4.1固定電壓陽極處理 18
4.1.1單階段陽極處理 18
4.1.2多階段陽極處理 21
4.2固定電流陽極處理 23
4.2.1陽極處理之不同電流密度與反應速率關係 23
4.2.2陽極處理初始電流密度與電解液濃度關係 24
4.3 固定電流與固定電壓之陽極處理氧化層比較 25
4.4電流密度調控陽極處理 25
4.4.1控制電流方式製備陽極氧化鋁之機制 26
4.4.2電解液濃度與穩定電位差關係 29
4.4.3電流密度與穩定電位差之關係 31
4.4.4成長速率與規則排列性之關係 34
4.4.5穩定電位差與孔洞間距之關係 34
4.5 陽極氧化鋁模板後續製程與孔洞排列形貌分析 42
4.5.1 移除背部障壁層 42
4.5.2 利用傅立葉轉換探討孔洞排列規則性 44
第五章 總結 47
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