具有單空間模態,低發散角,高功率的鋅擴散二維850nm面射型雷射陣列

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姓名

張晉豪(Chin-Hao Chang) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

具有單空間模態,低發散角,高功率的鋅擴散二維850nm面射型雷射陣列

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摘要(中)

我們證明了在850奈米波段的垂直共振腔面射型(VCSEL)雷射陣列上有高功率輸出、單模態的遠場、窄發散角的特性。我們透過是當的鋅擴散製程來調製鋅擴散孔徑跟氧化電流侷限孔徑的尺寸，使展現出每顆VCSEL都是高單模(highly single-mode)，窄遠場發散角（~6°）即有最大的輸出功率(~6.5mW)。而6x6跟10x10展現了單葉(single-lobe)遠場、窄發散角(~8°)，輸出功率分別達到104mW跟145mW。此外，透過量測陣列中不同位置的輸出光頻譜(optical spectra)，得知幾乎都是單模態的呈現，顯示出我們VCSEL陣列有良好的均勻性。此結果甚至優於其他大面積的同調激發(coherent lasing)光子晶體(photonic crystal)雷射。

摘要(英)

We demonstrate novel structures of 850 nm vertical-cavity surface-emitting laser (VCSEL) array for high output power, single-lobe far-field, and narrow divergence angle. By use of the Zn-diffusion process with proper sizes of oxide current-confined and Zn-diffusion apertures, each unit of VCSEL in the demonstrated array is highly single-mode (side-mode suppression ratio > 30 dB) with a narrow far-field divergence angle (~60) and high maximum single-mode output power (~6.5 mW). Due to the excellent uniformity of single-mode performance of each VCSEL unit, both 6×6 and 10×10 array exhibit a single-lobe far-field, narrow divergence angle (~80), and output power as high as 104 and 145 mW, respectively. Furthermore, by measuring the bias dependent output optical spectra in different positions of our array, the high similarity of these spectra indicates the excellent uniformity of our process for single-mode VCSEL performance. Such measured result is even comparable with the reported large-area coherent lasing photonic crystal laser.

關鍵字(中)

★ 面射型雷射
★ 陣列
★ 單模態

關鍵字(英)

★ VCSEL
★ arrays
★ single mode

論文目次

摘要 i
Abstract ii
圖目錄 v
表目錄 ix
第一章序論 1
1-1 VCSEL應用 1
1-2 面射型雷射簡介 2
1-3 單模態VCSEL製作 3
1-4水氧層掀離製作 8
第二章理論 9
2-1 VCSEL的磊晶結構 9
2-2 鋅擴散於DBR 12
2-3 VCSEL的選擇性水氧化理論 15
2-4 發散角 17
第三章實驗 19
3-1 鋅擴散製程 19
3-2 水氣氧化 21
3-3 製作電極以及金屬回火(Annealing) 23
3-4平坦化及製作金屬接線 25
第四章量測結果與討論 28
4-1量測系統 28
4-1-1. 光功率對電流(L-I)之量測 28
4-1-2. 遠場(Far field)之量測系統 28
4-1-3. 近場(Near field)投影之量測系統 29
4-1-4. 頻譜(Spectrum) 之量測系統 29
4-2 水氧化合併鋅擴散型VCSEL量測結果 30
4-2-1 VCSEL元件結構圖 30
4-2-2 輸出光功率對電流（L-I）曲線 31
4-2-3. 近場（Near field）投影 33
4-2-4.遠場(Far field)發散角(Divergence angle） 34
4-2-5. 光頻譜(Optical spectra)圖 36
4-3 Benchmark 38
第五章未來研究與討論 39
5-1 未來研究動機 39
5-2 量測結果 40
5-3 結論 44
Reference 45

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指導教授

許晉瑋(Jin-Wei Shi)

審核日期

2013-8-20

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