軟質子交換式MgO:LiNbO3波導作為準相位匹配二倍頻產生藍光之製程與特性探討

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姓名

謝承安(Chen-An Hsieh) 查詢紙本館藏

畢業系所

光電科學與工程學系

論文名稱

軟質子交換式MgO:LiNbO3波導作為準相位匹配二倍頻產生藍光之製程與特性探討
(Fabrication process and characteristics investigation of the soft proton-exchanged MgO:LiNbO3 waveguide as quasi-phase-matched second-harmonic blue-light generation)

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★ 準相位匹配二倍頻軟質子交換鎂摻雜鈮酸鋰波導研究	★ 以雙體積全像布拉格光柵及二維週期性晶疇極化反轉鈮酸鋰於Nd:YVO4雷射內達成脈衝式窄頻光參量振盪器之研究

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摘要(中)

雷射光學的發展提供了高強度的光源，使得非線性光學也得以實際使用到許多研究及日常生活中。而微型化後的積體雷射元件，更是在多種領域中廣泛的發展，例如藍光雷射可應用於生物醫療、光儲存與資訊讀寫、雷射列印以及高解析度印刷器的發展。
鎂摻雜鈮酸鋰晶體具有高非線性係數以及電光係數且大幅減少了光折變損害，適合應用於和頻以輸出藍光窄頻光源，本研究即在鎂摻雜鈮酸鋰晶體上製作軟質子交換波導與準相位匹配結構，針對波長976nm輸入至488nm藍光輸出的二倍頻轉換進行優化，目的使轉換效率接近理論值。造成實驗和理論轉換效率差異原因有三，一、波導的耦合條件和基頻光976nm的耦合條件不匹配，以至於耦合損耗過大。二、波導中等效折射率造成準相位匹配週期的差異。三、基頻和倍頻模態在波導疊加積分不足。
首先，本論文使用模場直徑量測法量測出軟質子交換通道式波導的基頻光基模模場分布，取得了實驗上通道式波導的耦合條件。再者，進行等效折射率分布量測，得到976nm基頻光基模在通道式波導內的等效折射率，配合稜鏡耦合器量測並計算出波導內976nm二倍頻轉換所需週期基模轉基模週期

摘要(英)

The development of laser optics promotes the realization of numerous nonlinear optics applications in research and practical purpose. For instance, integrated-blue light lasers can be applied in bio-medical, optical storage, laser printing, and high resolution photolithography.
Mg-doped Lithium Niobate (Mg:LN) possess high nonlinear coefficient, electro-optical coefficient, and low photorefractive damage effect, which benefit Mg:LN to be the candidate to generate blue-light laser source by nonlinear conversion. This thesis is for the purpose of optimizing the second harmonic generation (976nm to 488nm) conversion efficiency to approach theoretical efficiency in Soft Proton Exchange (SPE) Mg:LN waveguide. There are three factors contribute to the discrepancy between the empirical and theoretical conversion efficiency. First, high coupling loss result from the numerical aperture mismatch of fundamental mode (976nm) and waveguide. Second, imprecise design of QPM grating period from roughly estimated effective refractive index. Third, poor modes overlapping between fundamental and converted mode.
In the first part of this thesis, we utilize Mode field Diameter (MFD) method to measure the fundamental mode profile of SPE waveguide, and calculate the numerical aperture of our waveguide. Second, with the
effective refractive index measurement, we measured the effective refractive index with 976nm fundamental mode in SPE channel waveguide, calculate with the effective refractive index with 488nm fundamental mode and first order mode from prism coupler planer waveguide measurement result. We can get the real QPM period with SHG. Period

關鍵字(中)

★ 鈮酸鋰
★ 二倍頻
★ 軟質子交換
★ 波導
★ 製程
★ 藍光

關鍵字(英)

★ LiNbO3
★ second-harmonic generation
★ soft proton-exchanged
★ waveguide
★ Fabrication
★ blue-light

論文目次

目錄
論文摘要..…..…………………………………………………………….I
致謝……………………………………………………………………..IV
目錄……………………………………………………………………..IV圖目……………………………………………………………………..VI
表目………………………………………………………………….......X
第一章緒論
1-1 非線性光學的發展………………………………1
1-2 積體光學簡介……………………………………2
1-3 鈮酸鋰晶體………………………………………2
1-4 研究動機…………………………………………5
1-5 內容概要…………………………………………8
第二章非線性轉換理論
2-1 非線性轉換現象………………………………..9
2-2 雙折射相位匹配………………………………12
2-3 準相位匹配技術………………………………14
第三章軟質子置換式波導
3-1 質子交換波導…………………………………17
3-2 退火式質子交換波導…………………………19
3-3 軟質子交換波導………………………………20
3-4 波導內二倍頻非線性轉換原理………………23
第四章波導內藍光二倍頻轉換優化與量測原理
4-1 波導內二倍頻轉換因素………………………27
4-2 稜鏡耦合器原理………………………………29
4-3 通道式波導內光場分布與折射率分布量測…31
4-4 波導模場直徑量測……………………………34
第五章元件製程
5-1 週期性晶疇及化反轉結構製作………………40
5-2 軟質子交換通道式波導製作…………………46
第六章波導量測與準相位匹配結構週期計算
6-1 通道式波導模場大小量測……………………50
6-2 平面波導量測…………………………………55
6-2.1 折射率變化與等效深度…………………55
6-2.2 模態等效折射率…………………………60
6-3 通道式波導模態等效折射率量測……………64
6-4 模態重疊積分模擬……………………………69
6-5 二倍頻準相位匹配週期計算…………………75
第七章實驗結論與未來展望
7-1 實驗結論………………………………………77
7-2 未來展望………………………………………78
參考文獻 ……………………………………………………………81

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指導教授

陳彥宏(Yen-Hung Chen)

審核日期

2013-11-11

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