博碩士論文 100389005 完整後設資料紀錄

DC 欄位 語言
DC.contributor材料科學與工程研究所zh_TW
DC.creator王榆茜zh_TW
DC.creatorYu-cian Wangen_US
dc.date.accessioned2016-3-30T07:39:07Z
dc.date.available2016-3-30T07:39:07Z
dc.date.issued2016
dc.identifier.urihttp://ir.lib.ncu.edu.tw:88/thesis/view_etd.asp?URN=100389005
dc.contributor.department材料科學與工程研究所zh_TW
DC.description國立中央大學zh_TW
DC.descriptionNational Central Universityen_US
dc.description.abstract一維透明導電氧化物奈米材料被認為是未來軟性電子產品的關鍵材料之一。目前氧化物奈米線若採用低溫製程製備則多有成長速率太慢的缺點;若以高溫成長方式,則必須多一道繁瑣的奈米線轉移至目標基板的步驟,因此開發低溫快速成長製程將能促進奈米線落實在實際應用層面。 我們首次以電漿迴旋共振化學氣象沉積法製備氧化銦奈米線。以蒸鍍之銦奈米粒子作為金屬來源,藉由調整不同氧分壓獲得不同表面形貌與結晶結構的氧化銦奈米線。在此研究中觀察到在氧分壓低的成長範圍下(PO2<5E-2 mTorr),金屬銦擴散至氧化銦薄膜表面後,發生氧化反應後形成InOx作為成長奈米線的前驅物來源。而在氧分壓高的成長範圍下(2E-1zh_TW
dc.description.abstract One-dimensional transparent conductive oxide nanomaterial is considered one of the key materials of flexible electronics products in future. Currently, the low temperature preparation process for oxide nanowire has the disadvantage of low growth rate; if use high temperature preparation process, it must add a tedious post-growth transfer step. Therefore, developing low temperature and rapid growth process will be able to promote nanowires for applications. Plasma-assisted growth of indium oxide nanowires (InO-NWs) were performed in electron cyclotron resonance (ECR) plasma with an O2-Ar system using indium nanocrystals as seed particles. In the low O2 partial pressure (PO2<5E-2 mTorr), the directly oxidation of indium which is diffusion from inner core through a thin InO layer by indium diffused from inner core to the surface of the thin InO layer can serve as the nucleation sites on the surface of thin InO layer. The morphologies and crystallinity varied with the O2 partial pressure. It high O2 partial pressure (2E-1en_US
DC.subject氧化銦zh_TW
DC.subject一維奈米結構zh_TW
DC.subject電漿輔助zh_TW
DC.subject低溫成長zh_TW
DC.subject氧化作用zh_TW
DC.subject抗反射zh_TW
DC.subjectindium oxideen_US
DC.subjectone-dimensional nanostructuresen_US
DC.subjectplasma-assisteden_US
DC.subjectlow-temperature growthen_US
DC.subjectoxidationen_US
DC.subjectantireflectionen_US
DC.title電漿輔助低溫成長一維氧化銦奈米結構zh_TW
dc.language.isozh-TWzh-TW
DC.titleLow temperature plasma-assisted growth of one-dimensional indium oxide nanostructuresen_US
DC.type博碩士論文zh_TW
DC.typethesisen_US
DC.publisherNational Central Universityen_US

若有論文相關問題,請聯絡國立中央大學圖書館推廣服務組 TEL:(03)422-7151轉57407,或E-mail聯絡  - 隱私權政策聲明