博碩士論文 102521031 完整後設資料紀錄

DC 欄位 語言
DC.contributor電機工程學系zh_TW
DC.creator陳品荃zh_TW
DC.creatorPin-chuan Chenen_US
dc.date.accessioned2015-8-26T07:39:07Z
dc.date.available2015-8-26T07:39:07Z
dc.date.issued2015
dc.identifier.urihttp://ir.lib.ncu.edu.tw:88/thesis/view_etd.asp?URN=102521031
dc.contributor.department電機工程學系zh_TW
DC.description國立中央大學zh_TW
DC.descriptionNational Central Universityen_US
dc.description.abstract本論文利用選擇性氧化在氮化矽上方之複晶矽鍺柱的方式,形成鍺量子點包覆於二氧化矽內並鑽入下方氮化矽與矽基板接觸,並利用鍺量子點和矽基板接面生成3~4 nm品質良好的二氧化矽,同時解決矽鍺界面4.2%晶格不匹配與形成優良矽鍺異質結構,進而將此二氧化矽整合於金氧半(Metal-Oxide-Semiconductor )場效電晶體作為元件閘介電層,利用蝕刻鍺量子點上方的氧化層將之裸露,形成鍺量子點閘極/二氧化矽/矽底材之結構。藉此有效降低元件介電層厚度與電阻-電容時間延遲常數(RC delay time constant),成功地研製出特性良好的鍺量子點閘極(Germanium quantum dot-gated)場效光電晶體(photoMOSFET)。 調變複晶矽鍺柱尺寸和氧化時間製作鍺量子點大小50 nm、70 nm和90 nm的鍺量子點閘極場效光電晶體。未照光時,電晶體有相當小的次臨限斜率,可做為開關元件使用。藉由光電量測得知,波長850 nm(功率4.38 mW)光照射下,鍺量子點大小50 nm、70 nm和90 nm的元件,光暗電流比值在元件關閉時分別為3.28×106、2.39×106和9.66×105;元件開啟時分別為8.23、11.3和5.13。光響應(Responsivity)在元件關閉時分別為5.25 A/W、6.26 A/W和6.6 A/W;元件開啟時分別為1481 A/W、2913 A/W和10597 A/W,元件對近紅外光的響應度相當出色。 最後,探討調變鍺量子點尺寸對元件特性的影響,不照光情況下,尺寸較小的量子點有較好的次臨限斜率與訊號放大能力。照光情況下,鍺量子點尺寸由小至大其鍺含量由少至多,光電流量和光響應在元件關閉時因鍺含量增加而提升;元件開啟時受到元件自身的訊號放大能力影響,鍺量子點尺寸較小的元件具有較大的光電流量和光響應,補足尺寸小量子點激發光電流較低的缺失。 zh_TW
dc.description.abstractIn this thesis, Germanium quantum dots (Ge QDs) which individually surrounded SiO2 were formed by using selective oxidation of poly-crystalline SiGe pillars over the Si3N4 layer on the Si-substrate and then Ge QDs would burrowed into Si3N4 and eventually touched Si-substrate. The high quality SiO2 of 3-4 nm in thickness between Ge-QD and Si, which solves 4.2% lattice mismatch in between QD and Si-substrate, can be employed as the dielectric layer in metal-oxide-semiconductor field effect transistor. As the top SiO2 was etched until Ge QDs exposed, Ge-QD/SiO2/Si-substrate MOS structure was fabricated. Accordingly Germanium quantum dot-gated photoMOSFET which possessed tremendous photo-electrical characteristics was then realized, etching the gate dielectric thickness leads to effective reduction on RC delay time constant. Phototransistor with Ge QDs of 50 nm, 70 nm and 90 nm were fabricated, respectively, by the SiGe pillar size and time oxidation. The transistor had small subthreshold swing at darkness can be considered as a switch. Under illumination with wavelength of 850 nm and incident power of 4.38 mW, current enhancement of devices with Ge-QDs of 50 nm, 70 nm and 90 nm is 3.28×106, 2.39×106 , and 9.66×105 in off region and 8.23, 11.3, and 5.13 in on region respectively. Responsivity is 5.25 A/W, 6.26 A/W, and 6.6 A/W in off region and 1481 A/W, 2913 A/W, and 10597 A/W in on region were also observed showing great performance for near infrared ray. In the end, we investigated the effect of the QD size. The device with smaller QD size would get better subthreshold swing and amplification without illumination. Under illumination, photo current and responsivity would increase with higher Ge content because of larger Ge-QD in off region. However, the device with small QD size was determined by its amplified ability and then compensated the effect of small QD size for less Ge content, getting better photo current and responsivity. en_US
DC.subject鍺量子點zh_TW
DC.subject鍺閘極zh_TW
DC.subject場效光電晶體zh_TW
DC.subjectGermanium quantum doten_US
DC.subjectGermanium gateen_US
DC.subjectphotoMOSFETen_US
DC.title鍺量子點閘極場效光電晶體之研製與光電特性分析zh_TW
dc.language.isozh-TWzh-TW
DC.titleFabrication and characterization of Germanium quantum dot-gated photoMOSFETen_US
DC.type博碩士論文zh_TW
DC.typethesisen_US
DC.publisherNational Central Universityen_US

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