| dc.description.abstract | Metal-Organic Chemical Vapor Deposition, MOCVD, is one of the most important technologies to manufacture the LED. Depending on the type of film material, such as a single crystal, amorphous materials and other epitaxial deposition process. In this study, the computer simulation (COMSOL) method to develop the three-dimensional numerical simulation model. The numerical parameter will involve the inlet flow rate, the chamber pressure, the susceptor rotation rate, use the thermal-flow field and the species concentration to realize the mechanism between the growth rate and the uniformity of film, also compare with paper to define the ture model. After that, design of the basic geometry and then the study of number of the inlets and the chamber height was done. The result presents the that when the inlets is 15, height is 110mm, the film growth rate and uniformity is better. Finally, the study of optimization of the slit inlets was done. The results shows the gas inlet design with the double concentric vertical and the barrier of inlet will improve uniformity of the concentration of reactive species and uniform region on the susceptor to improve the problem of the low gas-usage.
This study also applied experimental method to the flow field of the visualization of the reaction chamber was experimentally measured. There are several experimental parameters which affect the chamber thermal flow and stability, such as susceptor temperature, inlet flow rate, and chamber pressure. In order to observe the thermal flow and velocity distribution in the chamber, Time-Resolved Digital Particle Image Velocimetry Tool for MATLAB, PIVlab was used as the flow visualization technique. The result shows that in the single jet chamber, use the dimensionless number (Re, Gr) to realize the mechanism between the force convection and the natural convection, then both the flow field are seriously affecting the film deposition rate, uniformity. Finally, using numerical simulation and experimental results do compare, resulting consistent need to make improvements and modifications. | en_US |