| dc.description.abstract | In this paper, a three-axis fluxgate magnetic sensor based on a planar construction and assembled with magnetic core and flux conductor is proposed. Through the PCB manufacturing process, the yield and reliability of the components are improved, and the alignment error of the coil configuration is reduced. The assembly and bonding of the flux conductor simplify the process steps. By using the planar magnetic fluxgate with two-axis sensing capability, with the assistance of the magnetic conductor, the planar magnetic flux is collected and transported into the planar core, eliminating the limitation of the planar magnetometer for out-of-plane magnetic field sensing. The design of the separated three-axis sensing mode reduces the axial interference and effectively achieves the three-axis magnetic field sensing. Through simulation analysis and experimental measurement, confirm the magnetization state of the magnetic core, and optimize the component parameters to improve the sensitivity and linear range. The presented sensor shows the 404.6 V/T sensitivity for the x-axis, 399.3 V/T sensitivity for the y-axis, and 112.2 V/T sensitivity for the z-axis with nonlinearity less than 5% in the linear range of 0-140 μT. Furthermore, the sensing of vectorial magnetic field was demonstrated in three axes. | en_US |