| dc.description.abstract |
In this paper, we use Boomerang Chart that we published in the past to analyze the wafer maps by generating upper bound and lower bound. Most importantly, we can reduce time and analyze efficiently.
At first, we choose five kinds of size of wafers that we would like to analyze, and simulate basic centerline according to these five kinds of size. Second, we will create parameters NBD and NCD from every wafer in every data, and normalize the two parameters to create two new parameters, NNBD and NNCD. And then, we will create twenty points from every defect. When NNBD equals to 0.1, 0.2, 0.3, 0.4 and 0.5, we save the NNCD standard deviation. Last, we use the centerline to plus one point nine six times NNCD standard deviation and to subtract one point nine six times NNCD standard deviation. We can obtain the upper bound and lower bound in 95 percent confidence interval. According to the upper bound and lower bound, we understand whether the defects are inside or not. So, we set to get the achievement of increasing yield、testing efficiency and reduce the production cost. | en_US |