| dc.description.abstract | Display industry of output value is still growing,with the growth of automobile electronics and portable electronic products. With the display industry of competition in China, Japan and other countries,taiwan display industry in order to increase market competitiveness, how to accelerate product development speed and good product yield is most important.The display company′s of process yield is not only impact on product quality, but also impact on production costs,so process yield is a critical factor for company′s operating.
Many apply six-sigma method to pursue high-quality product.Digitiz companties ation is mainly used to analyze the root cause and further improve the fundanmental problem.This thesis studies the Array process in TFT-LCD（Thin Film Transistor Liquid Crystal Dispaly）industry.The six-sigma project managemaent is applied to improve product yield rate and optimal parameter.
First we applied Cause and effects chart to analyze the possible factor of defect rate.Moreover,Plato,instrumental analysis, statistical method,DOE are applied to find out some major factors.Finally,the influence on Array process resulting in the main factors of source line defect are the two factors: deposit of film temperature and loadlock temperature in physical vapor deposition process,waiting time in source drain romove photoresist process.
Based on design of experiment,multiple parameter combinations are tested and analyzed.The results show that deposit of film temperature and loadlock temperature keep room temperature and waiting time control on one day.When the optimal combination is appplied to mass production,the source line defective rate is decrease from 34% to 3%.Scrap cost is decrease from eight million to two hundred thousand.Furthermore,the process can also achieve more productive and efficient.The study reveals that the proposed method can successfully imporve the quality. | en_US |