dc.description.abstract | When a problem occurring on a wafer, it can be divided into two kinds of errors, random and systematic. In the study, we use previously proposed boomerang chart to classify the problem of real wafer (WM-811K).
With the advancement of technology, the processes are more advanced, wafer size and quantity are also increased. Therefore, in the construction of boomerang chart, it is necessary to simulate a larger number and more different sizes of randomness wafer maps. We must improve the algorithm and increase the speed of the operation to meet the trend of technology.
However, NCL, one of the two important parameters of boomerang chart—NBD (number of bad die) and NCL (number of contiguous line), planned by a bad strategy in previous algorithm in the process of formulating the algorithm according to the original definition. Thus, it would cause time-consuming badly. When the number of random types increase and the wafer size becomes larger, the operation time would increase nonlinearly. Therefore, the research is going to develop a new search flow without violating the original definition and designs a new algorithms to improve the problem of increasing time in simulate larger randomness wafer map.
The new search strategy not only provides clear and detailed search rules, but also improves the speed of calculations larger randomness wafer map. When developing algorithms, it achieves significant acceleration. Furthermore, the algorithm can be easily implemented in various programming languages as well.
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