DC 欄位 |
值 |
語言 |
DC.contributor | 光電科學與工程學系 | zh_TW |
DC.creator | 邱盈蒼 | zh_TW |
DC.creator | Ying-Cang Qiu | en_US |
dc.date.accessioned | 2020-1-7T07:39:07Z | |
dc.date.available | 2020-1-7T07:39:07Z | |
dc.date.issued | 2020 | |
dc.identifier.uri | http://ir.lib.ncu.edu.tw:88/thesis/view_etd.asp?URN=106226021 | |
dc.contributor.department | 光電科學與工程學系 | zh_TW |
DC.description | 國立中央大學 | zh_TW |
DC.description | National Central University | en_US |
dc.description.abstract | 本論文以製作微米尺寸垂直式有機發光電晶體(Vertical organic light-emitting transistors, VOLETs)陣列為主,除了詳細說明8×8點矩陣式面板的設計與製作流程之外,還清楚解釋其背後原因。
透過原子層沉積(ALD)及曝光顯影等技術,製作出垂直式有機發光電晶體面板。使用ALD沉積高介電係數的三氧化二鋁與氧化鉿作為雙層介電層,並以ALD沉積N-type半導體材料氧化鋅,同時搭配綠光有機材料PFO:F8BT作為發光層。藉由顯影蝕刻方式將氧化鋅做微小圖案化,以達到單一像素尺寸最小可達到10μm×15μm的發光面積。透過光學微影技術,將每一道光罩圖案精準製作在元件上,使微小面積下有64個單一垂直式有機發光電晶體。同時發現電荷下注入式的垂直有機發光電晶體結構中,裸露出的氧化鋅面積與發光面積是一致的,利用此現象來定義發光面積。最後利用Arduino微控制器對面板進行驅動並成功發出10μm×15μm面積的綠光。
| zh_TW |
dc.description.abstract | In this thesis, micro-sized Vertical organic light-emitting transistors (VOLETs) arrays, in addition to explaining the design and manufacturing process of 8 × 8 dot matrix panel in detail, the reasons behind it are also explained clearly.
Through the technologies of atomic layer deposition (ALD) and exposure development, a vertical organic light-emitting transistor panel is fabricated. ALD was used to deposit aluminum oxide and hafnium oxide with a high dielectric constant as a double-layer dielectric layer, and ALD was used to deposit an N-type semiconductor material, zinc oxide, and a green organic material, PFO: F8BT, was used as a light-emitting layer. The zinc oxide is micro-patterned by a development etching method, so as to achieve a minimum light emitting area of a single pixel size of 10 μm × 15 μm. Through optical lithography technology, each photomask pattern is accurately fabricated on the substrate
, so that there are 64 cell of the vertical organic light-emitting transistors under the micro size area. At the same time, it was found that in the vertical organic light-emitting transistor structure of the downward injection type of charge, the area of the exposed zinc oxide and the light-emitting area are consistent, and this phenomenon is used to define the light-emitting area. Finally, the panel is driven by an Arduino microcontroller and a 10μm × 15μm area is successfully radiant green light.
| en_US |
DC.subject | 垂直式有機電晶體 | zh_TW |
DC.subject | 垂直式有機發光電晶體 | zh_TW |
DC.subject | 高介電常數介電層 | zh_TW |
DC.subject | 面板設計 | zh_TW |
DC.subject | 微影製程 | zh_TW |
DC.subject | Vertical Organic Transistors | en_US |
DC.subject | Vertical Organic Light-emitting Transistors | en_US |
DC.subject | High-k Dielectric Layer | en_US |
DC.subject | Panel Design | en_US |
DC.subject | photolithography | en_US |
DC.title | 垂直式有機發光電晶體 之點矩陣式微米尺寸面板設計與製作 | zh_TW |
dc.language.iso | zh-TW | zh-TW |
DC.title | Vertical Organic Light-emitting Transistors of the Micron Size Panel Design and Fabrication | en_US |
DC.type | 博碩士論文 | zh_TW |
DC.type | thesis | en_US |
DC.publisher | National Central University | en_US |