| dc.description.abstract | PFCs (perfluorocarbons) and N2O are used extensively in the high-tech
industry, however, they are listed as greenhouses gas due to their high global
warming potentials and long lifetimes. Therefore, development of effective
removal technologies for reducing PFCs and N2O emissions has become an
important issue. At present, the emission control methods of PFCs and N2O
include the use of alternative chemicals, improvement of the utilization rate,
recycling and direct destruction. However, compared to the difficulty of
developing alternative chemicals, modifying the process and the high cost of
recycling, direct destruction is relatively simpler. In this study, a non-thermal
plasma combined with the catalyst system was used to convert the PFCs (CF4,
C4F8) and N2O. We studied the decomposition efficiencies of CF4, C4F8 and N2O
achieved with the plasma and changed the parameters to explore the reaction
mechanism. The results show that when γ-Al2O3 is used as a catalyst, good
activities for conversions of CF4, C4F8 and N2O are observed. In the plasma
catalysis system, 100% conversion efficiency of CF4 can be achieved at 12 kV;
for C4F8, 100% conversion efficiency can also be achieved 100% at 22 kV; N2O
can maintain conversion efficiency of 90%. The main products of the CF4 and
C4F8 conversions are mainly CO2 and COF2 with presence of O2. When water
vapor is added, HF is also formed. The main products of N2O conversion are
presumed as N2, O2 and NO. This study has confirmed that the non-thermal
plasma combined with the catalyst system to convert CF4, C4F8 and N2O is
indeed feasible and has good potential for further development.
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