| dc.description.abstract | Recently, the nanoporous anodic aluminum oxide (AAO) have widely used as templates in nanotechnology. On account of their features continuous, well-organized nanostructure, they can easily adjustable morphological properties and wide range of applications such as drug delivery, membrane filtration, antireflection coating, catalysis and synthesis of various nanostructures. To fabricate thin AAO template with regular nanopores arrays, a variety of patterning techniques have been developed such as nanoimprint lithography, polymer template assisted method and e-beam lithography. However, the above-mentioned processed are high cost, operational complexity and low processing speed make them challenging to use. In this work, we fabricated the thin polymer micro/nanostructures to combine of nanosphere lithography, anodizing and hot-embossing process approach to fabricate thin AAO templates, which is based on the nanosphere lithography with multistep anodizing and etching pore-widening process. The pore diameters, pore lengths can be varied by changing the anodization parameters such as the type of the electrolyte, the electrolyte concentration, the working temperature, the applied voltage and the working time. To fabricate the double-sized diameters template for producing double-sized polymer nanocones. The polymer nanostructure has a hydrophobicity and superhydrophobicity. Wettability of the solid surface is an important property because controlling the surface wettability is significant in many functional applications in MEMS, micro-fluid, and biomaterials. The polymer nanostructures had the potential of liquid transportation. In addition, the polymer micro/nanostructure are widely used in liquid-crystal display and plasma display panel because it has the characteristics of transparency, light weight, small size, flexibility and robustness. | en_US |