dc.description.abstract | As technology advances, the processing accuracy of precision machinery is closely related to the accurate calibration and positioning of the processing machine. Whether it is displacement or angle, it needs to rely on a high-accuracy measurement system to provide the basis for the calibration and positioning of the processing machine. And this research will propose a measurement method for the roll angle. In recent years, many scholars have also proposed methods and techniques for measuring the roll angle. Some of them use heterodyne interferometers combined with phase retarders or prisms, and also use laser collimator combined with gratings, which can be achieved for different measurement components. The purpose of roll angle measurement. The system developed in this research uses a birefringent crystal as the measuring element. The heterodyne interferometer has the advantage of high resolution, but its traditional phase-resolving system is bulky and complex, so it cannot be used in areas with limited space. Therefore, this research introduces a novel polarization camera to replace the traditional phase-resolving system and establish a common-path measurement system to reduce environmental interference, and at the same time has the advantage of high resolution. This research proposes a "Roll Angle Measurement based on Birefringence Polarization Interferometry", which is a common-path roll angle measurement system, which can quickly obtain the phase difference signal introduced by the birefringent crystal through a polarization camera combined with polarization interferometry. And through the calculation of the relationship between the phase difference and the roll angle, the change amount of the roll angle is obtained. The system effectively improves the problems of traditional interferometers such as bulkiness and complex structure. This paper verifies the feasibility of the measurement system through the measurement experiments of different roll angular strokes of large, medium and small. The roll angular strokes of the stroke measurement experiment are respectively 0.5º, 0.1º and 0.05º. The experimental results can be used to verify the feasibility of the measurement system. In addition, according to the analysis of the measurement uncertainty principle, the resolution of the roll angle measurement system in this study can reach 0.0023º, and it has a measurement range of 10º. Finally, through the analysis of system error and random error, an effective method for improving and compensating the error is proposed, thereby improving the stability and accuracy of the measurement system. | en_US |