dc.description.abstract | With the rapid development of science and technology, the demand for high-power and high-frequency components is increasing. Ceramic has the advantages of high strength, high stability and high thermal conductivity. It is an excellent carrier for high-power electronic products. In the past, ceramic substrates were often processed by laser and mechanical methods, which often caused many processing difficulties due to the hard and brittle properties of the material.
Projection Micro-stereolithography (PμSL) technology is one of the most promising additive manufacturing technologies. It achieves micron-resolution printing through miniaturized projection. It solves the manufacturing difficulties of complex and tiny components in the past. At the same time, through the improvement of scholars, the ability of cross-scale manufacturing has been prepared which can make up for the shortcomings of the past micron manufacturing. So that the complex structure with micron resolution can have more applications.
The advantages of single-layer ceramic substrates are simple in design and low in manufacturing cost. When using the additive manufacturing method, if they can be formed in the form of cassettes at one time and replaced quickly, the production speed will be improved.
Therefore, this research develops a cassette-type green ceramic substrate production system by PμSL technology, which avoids the possible damage and processing limitations of laser processing and machining in the past by means of addtive manufacturing, and utilizes the cassette-type design to simplify the process and improve productivity. The software is developed using the C# programming language, integrating all software and hardware devices into the human-machine interface, and designing a path production program to give users a fast and intuitive interface. In order to solve the problem of out-of-focus caused by the replacement of the cassette, the OpenCV function is used to achieve automatic focusing in the research, so as to find the vertical coordinates of three points in the printing area, and calculate the horizontal correction amount through the formula. It is verified that the horizontal degree is less than 1.863 μm/mm. Print with different overlapping widths and grayscales, measure the results and record the data, and propose valid parameters. In order to improve the distortion when printing square holes, a pattern correction method was designed in the study, and different parameters were tested to improve the area matching rate of the ceramic from 69.56% to 96.66%. Finally, the self-developed cassette-type green ceramic substrate production system is used to realize the zirconia green ceramic substrate with the minimum 34 μm hole according to the above parameters to verify the function of the machine. | en_US |