| dc.description.abstract | The process of semiconductor wafers is complicated with many processes, and GaN, a third-generation material, is on the rise in the near future. In response to the advent of new material generation, the company has introduced many new equipment. Measurement equipment is used to ensure the wafer’s quality at critical process. Through pre-measure and post-measure, the process status can be confirmed in real-time.
When introducing a new measurement equipment into factory, the pre-processing involves many things, such as checking the connection between the program and the equipment, and the commands are accepted and executed properly by the equipment, and the format and content of the data uploaded to server by the program is in accordance with the processing engineer’s requirements.
The pervious operations listed above will be planned in the same schedule as the development of the program for management in factory. Therefore, in this paper, we will design the program architecture for different equipment suppliers’ measurement equipment, and analyze the operation flow and command message format and content through software engineering, and functionalize and modularize the program to provide the program for subsequent introduction of new measurement equipment, as well as retain the flexibility of program. | en_US |