|DC.description||National Central University||en_US|
|dc.description.abstract||Microanode guided electroplating (MAGE) has been used to fabricate a three-dimensional microscale nickel column in nickel-containing baths. A Pt wire (125μm in diameter) was mounted with epoxy resin to expose a tip to act as a microanode that was moved to guide localized electroplating on a polished copper surface. Parameters, such as the dc-voltage bias, the waveforms of the bias and the gap between the electrodes were explored.
In this work, the morphology on the top-view and cross-section of the microclumn was examined using scanning electron microscope (SEM). Current or potential was monitored when MAGE was performed in different conditions controlled by varying the experimental parameter. The threshold strength of the electric field to start deposition for the MAGE process was found out. In an inter-electrode gap of 10μm, the deposition rate of the MAGE process was too slow (<0.02μm/s) to put in use. On the other hand, the deposition rate could increase to 0.667μm/s when the applied voltage reached 6.6V, but the surface morphology of the columns deposited was very rough.
The surface morphology and internal structure of the micro-columns deposition by MAGE process were determined by the strength of electric field. The nickel micro-columns prepared by MAGE at applied voltage 6V with an inter-electrode gap of 10μm was smooth in surface morphology and filled density in the internal structure. The surface morphology became rougher and few pores were involved in the internal structure when the applied voltage increased to 7V. The higher the applied voltage the rougher in surface morphology and the greater pores size and number in the internal structure.
Current and voltage in the MAGE process was in-situ monitored. The monitored data were useful for further adjustment to obtain nickel columns in high quality.
Electrochemical impedance spectroscopy and polarization resistance were investigated to examine the corrosion behavior of the nickel micro-columns prepared by MAGE process. The nickel micro-columns prepared at 6V with 10μm were more resistant to corrosion than that prepared at 7V with the same inter-electrode gap.||en_US|
|DC.subject||Microanode Guided Electroplating||en_US|
|DC.title||Microanode Guided Electroplating (MAGE) and its Monitoring||en_US|
|DC.publisher||National Central University||en_US|