| DC 欄位 |
值 |
語言 |
| DC.contributor | 光電科學與工程學系 | zh_TW |
| DC.creator | 盧立瑋 | zh_TW |
| DC.creator | Li-Wei Lu | en_US |
| dc.date.accessioned | 2006-7-23T07:39:07Z | |
| dc.date.available | 2006-7-23T07:39:07Z | |
| dc.date.issued | 2006 | |
| dc.identifier.uri | http://ir.lib.ncu.edu.tw:88/thesis/view_etd.asp?URN=93226018 | |
| dc.contributor.department | 光電科學與工程學系 | zh_TW |
| DC.description | 國立中央大學 | zh_TW |
| DC.description | National Central University | en_US |
| dc.description.abstract | 相移精度於相移干涉術之量測，是最可代表樣品資料之可靠度。對利用相移干涉術來量測樣品之干涉儀而言，不準確之相移會在計算物體相位上產生誤差。本系統之相位移動器係由三個壓電致動器所構成，因為壓電致動器本身之差異與結構上受到不同應力之影響，在移動的過程中會產生移動不均的問題，意即在推進過程中改變參考面之法線向量，最直接的觀察方式為推動一週期後比較前後之干涉圖，干涉條紋有旋轉與間隔改變之現象，此現象亦反應在相位移之標準差。
針對此問題之解決方式，本論文提出一種校正相位移動器的方式，從理論推導出壓電致動器位移與條紋斜率之關係，從此關係中找出一特殊情況來校正，此方式利用條紋之變化來對壓電致動器之差異進行個別調校，從比對第一張與最後一張影像之差異變化，可發現利用此方法所得到之權重比例，的確改善了移動不均之現象。 | zh_TW |
| dc.description.abstract | The error of the movements of the phase-shifting adapter(PSA) determines the accuracy of measurement to a large degree. For large-apeture and weighty optical elements, we usually use an adapter with three PZTs to hold the tested optical element. It is very important to keep the adapter stretched as a flat. Otherwise, the shifting fringe patterns will rotate, and the distance between fringes will be changed. These phenomena will decrease the precision of phase-shifting interferometry.
In this thesis, a method to calibrate a phase-shifting adapter with three piezoelectric ceramics based on the relationship between the displacement of PZT and the slope of interference fringe is proposed to increase the testing precision of phase-shifting interferometer. Observing the first and the last interferograms, the unequal movement of the PSA is improved by this method. | en_US |
| DC.subject | 相位移動器 | zh_TW |
| DC.subject | 相位移校正 | zh_TW |
| DC.subject | 壓電材料 | zh_TW |
| DC.subject | phase-shifting adapter | en_US |
| DC.subject | phase-shifting calibration | en_US |
| DC.subject | piezoelectric ceramic | en_US |
| DC.title | 相位移動器校正之研究 | zh_TW |
| dc.language.iso | zh-TW | zh-TW |
| DC.title | Calibration of the phase-shifting adapter | en_US |
| DC.type | 博碩士論文 | zh_TW |
| DC.type | thesis | en_US |
| DC.publisher | National Central University | en_US |