博碩士論文 93323084 完整後設資料紀錄

DC 欄位	值	語言
DC.contributor	機械工程學系	zh_TW
DC.creator	臧志仁	zh_TW
DC.creator	Chih-Jen Tsang	en_US
dc.date.accessioned	2006-9-20T07:39:07Z
dc.date.available	2006-9-20T07:39:07Z
dc.date.issued	2006
dc.identifier.uri	http://ir.lib.ncu.edu.tw:88/thesis/view_etd.asp?URN=93323084
dc.contributor.department	機械工程學系	zh_TW
DC.description	國立中央大學	zh_TW
DC.description	National Central University	en_US
dc.description.abstract	本文架設一套差動式共焦顯微系統，並設計一模糊滑動控制器來抑制共焦顯微系統中掃描平臺的軸向擾動量。系統以麥克森干涉儀為感測器的位置回授裝置，實驗驗證，控制器可有效抑制12dB軸向擾動量，使掃描平臺動態定位穩態誤差小於25nm以下。 共焦顯微系統系統的縱向位移反應曲線斜率為2.03/?m，在考慮0.3%光源雜訊下，具有4nm的軸向解析度。本文選用鋁鍍膜試片作為樣本，經由自行架設的共焦顯微系統，經光強度-階高換算測得試片表面階高為369.4nm。	zh_TW
dc.description.abstract	In thesis , A differential co confocal microscopy, which with a fuzzy controller for suppressing the longitudinal disturbance of scanner in confocal microscopy, was developed. The system use Michelson interferometer as position control sensor. The experimental result shows that the fuzzy controller is effective in 12dB of the longitudinal disturbance suppression. And the system’’s position error is within 25nm. The experimental result shows that the slop of the intensity versus longitudinal displacement (SILD) curve is enhanced to 2.03/?m. To consider 0.3% noise in the system, a depth resolution as high as 4 nm has been achieved. A al-coating step height was measured. According to the difference of intensity and the SILD, a 369.4 nm step height was obtained.	en_US
DC.subject	共焦顯微術	zh_TW
DC.subject	干涉術	zh_TW
DC.subject	模糊滑動控制	zh_TW
DC.subject	精密定位控制	zh_TW
DC.subject	Confocal microscope	en_US
DC.subject	Interferometry	en_US
DC.subject	Fuzzy slidi	en_US
DC.title	雷射干涉儀於共焦顯微系統之軸向定位控制	zh_TW
dc.language.iso	zh-TW	zh-TW
DC.title	Using Interferometer to Control Axial Position in Confocal Microscope	en_US
DC.type	博碩士論文	zh_TW
DC.type	thesis	en_US
DC.publisher	National Central University	en_US