| dc.description.abstract | Tomography is a well-established technique for three dimensional structure determination amorphous specimens in life sciences applications; Semiconductor device size is diminished in recent year, it is difficult to explain complicated structure by two-dimension image. For this reason, it is advantage for tomography used in fault analysis.
Tomography consist of image acquisition、image alignment and image reconstruction. Cross-Collection and Feature Tracking are two methods in image alignment. Alignment well or not can influence with three-dimension image quantity seriously.
In the Feature Tracking, the gold particle number and distribution are two important factors in alignment quality. Therefore, in the first experiment, using different concentration of gold particle suspension adhere on the carbon film, and watching gold particles distribution situation.
Experiment results show large range of pollutants on carbon film, and therefore can not acquire gold distribution image, because of buffer solution in gold particle suspension contains twenty percentages glycerol. We decide to change another suspension only consists gold and water, and we get clear and uniform distribution gold image by using this suspension.
In Cross-Correlation experiment, well high pass filter and low pass filter parameters can make Cross-Correlation peak clear and sharp; the shift between image and above image can be reduced by well alignment.
The software used in this experiment is Inspect 3D made by FEI company, we set high pass filter up 0.01, 0.03, 0.05, 0.07 and 0.09 in low pass filter 0.1, 0.3, 0.5, 0.7 and 0.9. Compare effect of alignment by changing parameters which is the best in twenty-five sets in TEM and STEM modes.
After experiment, we find high pass filter 0.09 in low pass filter 0.5 has the best TEM image alignment in twenty-five sets, and high pass filter 0.03 in low pass filter 0.1 has the best STEM image alignment in twenty-five sets. | en_US |