博碩士論文 942206007 完整後設資料紀錄

DC 欄位 語言
DC.contributor光電科學與工程學系zh_TW
DC.creator曾彥鈞zh_TW
DC.creatorYen-chun Tsengen_US
dc.date.accessioned2007-7-18T07:39:07Z
dc.date.available2007-7-18T07:39:07Z
dc.date.issued2007
dc.identifier.urihttp://ir.lib.ncu.edu.tw:88/thesis/view_etd.asp?URN=942206007
dc.contributor.department光電科學與工程學系zh_TW
DC.description國立中央大學zh_TW
DC.descriptionNational Central Universityen_US
dc.description.abstract近年來,光子晶體微共振腔儼然成為光電元件研究領域中最重要的課程,人們也對 於光子晶體擁有應用在雷射與單光子源發射器得天獨厚的優勢產生濃烈的興趣。其中, 如要製作優良的光子晶體元件,無論是雷射或單光子源發射器元件,高品質因子與低模 態體積共振腔體的目標是我們一路上所追求與渴望的。然而,在本研究中我們設計ㄧ個 共振腔結構,並已製作出砷化鎵薄片光子晶體微共振腔元件。設計結構的方式,我們是 在六角排列的週期性晶格中改變兩個空氣柱直徑尺寸與位置而形成缺陷區域,這樣的結 構相似於傳統H1 點缺陷結構,因此我們將之命名為quasi-H1 結構(縮寫qH1 結構)。qH1 結構在我們利用二維有限時域差分法計算之水平品質因子高達約400,000 以及三維有限 時域差分法計算模態體積僅有0.011 μm3。 根據模擬結果,我們實際製作了一系列的光子晶體微共振腔於砷化銦量子點為主動 層的砷化鎵薄片上,其室溫品質因子可高達近4000,這是H1 光子晶體結構中世界最高 值。利用這些樣品我們將光子晶體參數(包含晶格常數和空氣柱尺寸)與品質因子間的關 係,亦作了系統性的研究與探討。zh_TW
dc.description.abstractIn recent years, photonic crystal micro-cavity has been a subject of great interest for various optoelectronic devices, such as lasers and single photon emitters. For the latter application, cavities with high quality factor and low mode-volume are most desirable. In this study, we design and fabricate GaAs photonic crystal membranes with a hexagonal lattice structure. A defect region is created by changing the diameter and location of the center two air holes of the lattice structure. Using two dimensional frequency-domain-time-difference simulation, a cavity with high quality factor (~400,000) and low mode-volume (~0.011μm3) is designed. A series of GaAs photonic crystal membranes with embedded InAs quantum dots has been fabricated accordingly. Quality factors as high as 4000 at room temperature are measured on the sample with an air hole diameter of 260 nm and distance of 450 nm. To the best of our knowledge, this is the highest value reported for H1 photonic crystal cavities. The correlation between the quality factor and lattice parameters is investigated systematically.en_US
DC.subject共振腔zh_TW
DC.subject光子晶體zh_TW
DC.subject模態體積zh_TW
DC.subject品質因子zh_TW
DC.subjectmode volumeen_US
DC.subjectphotonic crystalen_US
DC.subjectcavityen_US
DC.subjectqH1en_US
DC.subjectquasi-H1en_US
DC.subjectquality factoren_US
DC.title高品質因子與低模態體積光子晶體微共振腔之設計與製作zh_TW
dc.language.isozh-TWzh-TW
DC.titleDesign and Fabrication of High Quality Factror and Low Mode-Volume Photonic Crystal Micro-cavitiesen_US
DC.type博碩士論文zh_TW
DC.typethesisen_US
DC.publisherNational Central Universityen_US

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