| dc.description.abstract | Three kinds of dehydrated reagents, anhydrous sodium carbonate, anhydrous sodium sulfate, and anhydrous calcium chloride, are used to examine dehydrated efficiency for five waste photoresists and five waste strippers. The obtained results indicated as follows: (1) Anhydrous sodium carbonate shown the highest efficiency of dewater on the waste photoresist-A and the waste stripper-D, but the relative lower on the strippers-B and –C. (2) Anhydrous sodium sulfate indicated the relatively higher efficiency of dewater on the waste photoresists-A and –D. Similarly, poor efficiency was found on the strippers-B and –C. (3) Anhydrous calcium chloride for waste photoresist-A indicated a quite higher dewater efficiency. For waste photoresist-D and waste stripper-E, anhydrous calcium chloride presented a good dewater efficiency. However, the poor dehydrated efficiency was indicated on strippers-B and –C.
The experimental result also indicated that the best dewater efficiency of calcium chloride for waste photoresist-A was under static 3 hr. The longer static period of dewater will generate the lower efficiency. In addition, the dehydrated efficiency of sodium carbonate, and sodium sulfate increased with the increasing time of dewater. If sodium carbonate, and sodium sulfate were used as the dehydrated reagent for the waste stripper-D, the better efficiency of dewater can be found, and the efficiency also increase the increasing time.
The chemical components of the waste photoresists and the waste strippers are too complicated for understanding the dehydrated mechanism. Thus, reasons of less dehydrated efficiencies for the waste strippers-B and –C are difficultly explained. To test efficiency for other dehydrated reagent is needed for our future studies. | en_US |