| dc.description.abstract | In recent years ,Biochip technology and general mems products make technology often to use, lithography, etching, laser processing, LIGA,etc, So the production cost is expensive.to use polymer material fabrication carrier of microchannel Biochip,to replace the base plate of glass and silicon, Can achieve the purpose of the large amount production and to reduce production cost.
This experiment utilizes the carving machine, to Make width 200μm and depth 100μm model of microchannel, Use electropolishing technology make surface roughness 0.139μm Ra to 0.073μm Ra, using the hot embossing machine formation, and processed has material amorphous resin ABS, PMMA, PC, the grain weight approximately is 0.01g~0.016g, then for microchannel use hot embossing formation.
In recent years the optics industry including: digital camera, traditional camera, photographic equipment, optics part, lens, back light mold, and LCD optics of concave convex, almost uses PMMA, PC transparent material. ABS is auxiliary and matches the resin to mix the compound material. Therefore this experiment by ABS, PMMA and PC three kind of plastic materials discusses the formation’s the temperature, the pressure, and time etc, to forming influence the precision.
According to the hot embossing experimental results show that, ABS, PMMA, and PC etc, was high precision material to form , with besides the above parameters, control the cooling temperature , and the microchannel quality selects, and electropolishing the system the improvement etc, to product of the microchannel structure, was important influence parameter. The experimental result demonstration suitable processing parameter combination, surface roughness of the microchannel may reach 0.073μm Ra, and width of microchannel approximately 200 μm, Although the experimentation method was simple, but microchannel shape precision forming to promotion for Biochip technology development. | en_US |