dc.description.abstract | This study fabricated a nano-structure in the shape of a hexagonal-lattice grating through the arrangement of nanospheres. This structure offers a number of advantages, including easy fabrication, excellent coverage, and structural regularity. Such structures have been applied to the development of biosensors and color filter. This study proposes that a single layer sedimentation of nanospheres be used as an easily fabricated alternative to photolithography .
This study observed the resonance behavior of the proposed two dimensional guided-mode resonant through rigorous coupled-wave analysis (RCWA). Incident wavelength, grating thickness, and grating fill ratio were selected as the parameters for simulations. Using period = 780 nm as an example, when the fill ratio ≧ 0.6, resonance was achieved. By broadening the angular tolerance of the self-suspended subwavelength grating, this study fabricated a three two-dimensional guided-mode resonant filter.
The measurement results of wavelength and full width half maximum (FWHM) were λ(nm):Δλ(nm), respectively. Sample A: 1106:17, 1142: 22, 1368:30; Sample B: 1155:27, 1235:40, 1365:24; Sample C: 1276:102, 1624:151. This study demonstrated that Sample C in multi-mode showed broadening of angular tolerance at an oblique angle of incidence.
This study demonstrated that two-dimensional guided-mode resonance filters can be fabricated through the use of nanospheres, which can simplify the process of fabricating such devices.
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