| dc.description.abstract | Quartz has excellent properties, but its brittleness property results in the difficulty of balance between efficiency and precision for traditional machining method. ECDM aids in machining with high temperature fusion and etching, and is very appropriate for quartz material. In WECDM machining system, uneasy control of insulation gas film structure and difficult electrolyte circulation in machining zone. Therefore, thesis topic is to explore WECDM machining mechanisms, development new methods and improve the micro slit surface quality.
First, investigate the flow of electrolyte influence on the processing of quartz glass, adding graphite powder or silicon carbide powder of composite processing methods to improve the processing efficiency and accuracy. From experimental results, the surface roughness value for electrolyte WECDM machining without adding any powder under the same condition is Ra＝1.13μm, while the surface roughness may achieve Ra＝0.36μm as 0.4wt％ of graphite is added into electrolyte . The improvement rate is 68%. As 5wt％ of silicon carbide is added into electrolyte, the surface roughness can achieve Ra＝0.22μm, that is, the improvement rate is 80%. Furthermore, electrolyte is used very few under the best appropriate condition. It is proved that the utilization of graphite or silicon carbide characteristics for local machining of quartz glass in titration electrolyte is advantageous of improving surface quality effectively, reducing environmental pollution, lowering cost, and achieving one-time machining to reduce machining procedures.
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