博碩士論文 983207006 完整後設資料紀錄

DC 欄位 語言
DC.contributor光機電工程研究所zh_TW
DC.creator彭萬軒zh_TW
DC.creatorWan-Hsuan Pengen_US
dc.date.accessioned2012-7-28T07:39:07Z
dc.date.available2012-7-28T07:39:07Z
dc.date.issued2012
dc.identifier.urihttp://ir.lib.ncu.edu.tw:88/thesis/view_etd.asp?URN=983207006
dc.contributor.department光機電工程研究所zh_TW
DC.description國立中央大學zh_TW
DC.descriptionNational Central Universityen_US
dc.description.abstract本論文以硒化法來製備CIS薄膜,在製備銅銦金屬前驅物薄膜部分,分別使用了三個不同元素比例的銅銦合金靶材,其銅與銦之原子百分比分別為9:11 at% (Cu/In≒0.82)、1:1 at% (Cu/In=1)、11:9 at% (Cu/In≒1.22)進行比對研究,鍍製成銅銦金屬前驅物薄膜的原子比例分別是0.77、0.88、1.27。Se的來源為熱蒸鍍一層Se薄膜在銅銦金屬前驅物上面,再搭配二階段RTP硒化製程,使得CIS薄膜可快速完成硒化反應。 本論文著重於研究不同原子比例的銅銦前驅物薄膜與其製作成CIS薄膜之特性,實驗結果發現,只有0.88比例的銅銦前驅物薄膜才能製作出完整且可堆疊成元件的CIS薄膜,此結果受到薄膜之晶相以及組成比例的影響。 以SLG基板/Mo/p-CIS/CdS/ZnO/AZO結構為元件,並進行效率量測。元件在大氣環境下加熱至150oC,時間維持30分鐘之退火過程,效率較未退火前的元件(0.35%)提升不少(0.8%);但元件經過第二次退火加熱至200oC,時間維持30分鐘後,效率反而下降(0.26%),甚至較未退火前的元件還低。由實驗證實,元件經過溫度150 oC,時間30分鐘之退火條件,可使元件效率提升。 zh_TW
dc.description.abstractIn this thesis, CIS thin films were prepared by selenization method. The research used three different element ratio of Cu-In alloy target for deposition of copper-indium metal precursor, they were 9:11 at%,1:1 at%, 11:9 at% and the corresponding precursor films with Cu/In ratios of 0.77, 0.88, 1.27, respectively. The Se layer was evaporated on top of the precursor films and the CIS thin films were accomplished by using two-stage RTP process. This research investigated the characteristics of different atomic ratio of copper-indium metal precursor films and CIS solar cells. It was found that only Cu/In ratio 0.88 of precursor film was suitable to fabricate the CIS thin film and solar cell, this result was affected by crystal phase and Cu/In ratios of the precursor films. And this thesis used the soda-lime glass(SLG) substrates to manufacture SLG/Mo/p-CIS/CdS/ZnO/AZO thin film solar cell. The performance was measured before and after sequence of post-annealing treatment in the atmospheric environment. In this thesis, conditions of first post-annealing treatment on CIS cell was 150oC with 30min holding time, then second post-annealing treatment was 200oC with 30min holding time.The I-V curve results show that post-annealing treatment could significantly improve the short-circuit current, fill factor and conversion efficiency (form 0.35% to 0.85%) at temperature of 150oC for 30min, but the open-circuit voltage short-circuit current, fill factor and efficiency (form 0.85% to 0.26%) at temperature of 200oC for 30min. en_US
DC.subject快速熱處理zh_TW
DC.subject銅銦硒薄膜zh_TW
DC.subject硒化法zh_TW
DC.subjectRTPen_US
DC.subjectselenizationen_US
DC.subjectCIS thin filmsen_US
DC.title以RTP硒化法探討CIS薄膜及元件特性之研究zh_TW
dc.language.isozh-TWzh-TW
DC.titleInvestigation of CuInSe2 thin films and solar cells prepared by rapid selenization processen_US
DC.type博碩士論文zh_TW
DC.typethesisen_US
DC.publisherNational Central Universityen_US

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