||Due to the new semiconductor technologies such as multi-core processors are more popular, the interface to transmitting high data rate of core-to-core interconnect is important. On-chip interconnect module is the solution to overcome the high data rate demand in next generation. Here, we demonstrate an on-chip 10-Gbps optical interconnect module using three-dimensional silicon optical waveguides. This optical module include the vertical-cavity surface-emitting laser (VESEL), driver IC, amplifier IC, photodiode (PD), all integrated in the one silicon substrate. The system is optically complete and closed without any optical inputs or outputs, users do not have to worry about any optical issues, could only control the driver IC to operate the system.|
In this thesis, we use the 45° micro-reflector to achieve three-dimensional optical path. Signal transmission path is showed below, controlling driver IC to generate electric signal for VESEL, VESEL convert signal from electrical to optical, and the laser beam emitting from the VCSEL array is coupled into the waveguide via a 45° micro-reflector, propagates along the waveguide, and then is coupled into the PD via another 45° micro-reflector, finally the signal converted from optical to electrical and arrived to the amplifier. Proposed on-chip 10-Gbps optical interconnect module is based on SOI wafer. The 45° slants and proposed waveguide are fabricated on the device layer of (100)-oriented SOI wafer using anisotropic wet etching. The VESEL, PD, driver IC, amplifier are assembled on the isolation layer and connect the PCB by wire bonding.
According to the optical simulated and experiment results, optical loss achieve 2.22 dB. Initial condition for high-frequency measurement : Driver IC supply 10 mA driver current to VCSEL, modulation current is 12.5 mA, output power is 1.82 mW. Amplifier supply -1.7 voltage to PD. Delivering a 2-31-1 PRBS signal at 10-Gbps at wavelength of 1310 nm. Finally we get a eye diagram for the data rate at 10-Gbps. The eye height is 218 mV, signal to noise Ratio (SNR) is 24, jitter is 30.22 ps, the eye is wide open with a BER < 10-12, indicating a good transmission capability.
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