利用暫態熱線法之微型熱傳導係數量測元件之設計與製備

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顏宸禹(Chen-yu Yen) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

利用暫態熱線法之微型熱傳導係數量測元件之設計與製備
(Design and Fabrication of a Micro-THW Device for Thermal Conductivity Measurements)

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摘要(中)

暫態熱線法由於量測速度快、不受熱對流影響、設備架設容易等優勢，因此在流體之熱傳導係數的量測上應用相當廣泛。近年來由於奈米流體與生醫產業發展的需求，針對局部生物組織以及微量樣品的研究逐漸增加，而相關樣品之價位大多偏高且生產不易，如今隨著微製程技術的進步，發展以微量樣品進行量測的元件與技術也將逐漸起步。本文將利用微機電系統(MEMS)的製程技術配合數值模擬，設計並製作微型的熱線法量測元件。
在暫態熱線法的量測中，需由加熱的時間配合熱源的溫度以求得樣品之熱傳導係數，而系統的邊界將對其結果產生影響，該現象在微量樣品的量測中更為明顯。因此本文首先利用數值模擬針對熱源幾何外型進行探討，發現熱源截面的長寬比將影響資料選取的時間規劃，而配合適當的外邊界設定，可以精確的規劃出量測合適的資料選取範圍。此外，線熱源的長度與端部效應之間有著密切的關係，藉由增加線熱源的長度可以有效的減少端部效應的影響。在計算樣品之熱傳導係數的研究上，當熱源介於兩樣品的交界面，所測得的熱傳導係數為兩樣品熱傳導係數之算術平均數，而量測過程中端部效應的影響程度將由熱擴散係數較低的一方主導。在針對以不同電流對樣品的量測實驗中，發現所得之熱傳導係數隨著電流增加而上升，若當樣品熱傳導係數與溫度關係越密切，則使用越大的電流將導致越大誤差。本研究針對空氣、水與不同濃度的甘油進行量測，藉由比較發現其結果與文獻之間差異約5 %，可以準確地進行量測，未來該元件將應用於微量奈米流體的量測與相關研究上。元件之後的量測中發現，本研究所設計的元件其量測結果與文獻比較約低了4 ~ 6 %。

摘要(英)

The transient hot-wire method (THW) is widely used for measuring the thermal conductivity of fluids, due to its fast measurement, less convectioneffect, and relatively simple set up. In recent years, nanofluids and biological fluids have drawn attention in thermal transport applications. The high-cost or diffcult-to-produce samples draw the need of defeloping miniaturized devices to measure fluid samples in small quantity. In this study, we develop a micro-THW device to measure the thermal conductivity of fluid with micro-litter volume using MEMS (micro-electromechanical system) fabrication techniques. Numerical simulations are performed to assist the geometric design and evaluation of the measuremnt errors.
First, we study the effect of the heating line geometry, and find the length-to-width ratio of the heating-line cross-section affects the measurung time interval selection. With the appropriate design of the outer boundary of the testing domain, we can obtain the right data selection of the measurements. Furthermore, the end effect has a close relation to the length of the heating-line, which can be alleviated by increasing the length of the heating-line. In the case when two media are present in the measurement, we find that the measured thermal conductivity is the arithmetic mean of the meadia and the influence of end effects is dominated by the one with lower thermal diffusivity. Different current measurements are tested, and it is found that the error increases as the current increas, which should be taken into account for high-accuracy measurements. Finally, we measure the thermal conductivity of water and glycerin with different concentration. The measured results are around 5% deiated from the literature value.

關鍵字(中)

★ 暫態熱線法
★ 微機電系統製程
★ 熱傳導係數

關鍵字(英)

★ THW
★ transient hot wire method
★ MEMS
★ thermal conductivity

論文目次

摘要 i
Abstract ii
謝誌 iv
目錄 v
圖目錄 vii
表目錄 xv
第一章緒論 1
1-1 研究背景 1
1-2 研究動機與目的 4
1-3 文獻回顧 5
論文架構 8
第二章理論基礎 9
2-1 基本熱傳理論 9
2-1-1 熱傳遞的型式 9
2-1-2 熱傳導係數 10
2-1-3 熱擴散方程式 11
2-2 熱傳導係數量測方法分類 14
2-3 暫態熱線法 17
2-3-1 暫態熱線法的發展 17
2-3-2 熱線法理想數學模型的基本假設 25
2-3-3 熱線法理想數學模型 26
2-3-4 端部效應 36
第三章研究方法 38
3-1 研究架構 38
3-2 模擬方法 40
3-2-1 模擬軟體 41
3-2-2 二維徑向模擬 42
3-2-3 二維軸向模擬 49
3-2-4 三維模擬 55
3-3 元件製程 59
3-4 溫度電阻關係量測 66
第四章結果與討論 70
4-1 熱線法的模擬研究 70
4-1-1 熱源徑向截面幾何外型的模擬 70
4-1-2 氮化矽薄膜對於熱源的影響 78
4-1-3 兩相異介質的模擬與應用 83
4-1-4 熱線元件的外邊界影響與量測時間的評估 89
4-1-5 由二維軸向模擬探討端部效應的影響 98
4-1-6 端部效應對於相異介質量測的影響 109
4-2 暫態熱線法元件設計與製作 112
4-2-1 元件設計 112
4-2-2 熱線元件完成品 117
4-3 熱線法的實驗量測結果整理 121
4-3-1 空氣的實驗量測分析 121
4-3-2 水與甘油的實驗量測分析 128
4-3-3 不同濃度之甘油熱傳導係數驗證 136
4-3-4 不同加熱電流對於熱傳導係數估算的影響 140
第五章結論與展望 149
5-1 結論 149
5-2 未來展望 151
參考文獻 152
附錄一不同濃度之甘油熱傳導係數 156

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指導教授

洪銘聰(Ming-tsung Hung)

審核日期

2013-11-20

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