新型波長調制外差光源應用於位移量測

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姓名

鍾於哲(Yu-che Chung) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

新型波長調制外差光源應用於位移量測
(A novel wavelength-modulated heterodyne light source for displacement measurement)

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摘要(中)

本論文提出一套新型的波長調制外差光源，並將此新型外差光源應用於一維
和二維準共光程光柵干涉儀之位移量測上。利用雷射二極體搭配雙折射晶體來產
生新型的外差光源，雷射二極體波長受到鋸齒波調制，並利用雙折射晶體具雙折
射率的特性，使得入射光的p 偏振光與s 偏振光產生一光程差，進而得到外差光
源。此新型外差光源的產生方式，可達到縮小體積與降低成本的功效。
首先利用四分之一波片來驗證此新型外差光源應用於相位解析的可行性，接
著應用於一維和二維準共光程光柵干涉儀之位移量測上，利用壓電平台來使光柵
位移，並利用鎖相放大器擷取因光柵位移而產生的相位變化，反推光柵位移量。
實驗證明本系統於一維準共光程光柵干涉儀之架構上量測解析度約為10
nm，於二維準共光程光柵干涉儀之Z 方向與Y 方向的量測解析度分別為10 nm
與20 nm，系統靈敏度為0.18°/nm。
關

摘要(英)

A novel “ Wavelength-modulated heterodyne light source ” was proposed. The novel heterodyne light source was applied to the displacement measurement based on one-dimensional or two-dimensional quasi-common optical
path grating interferometry. The novel heterodyne light source used here consists of a birefringent crystal and a laser diode. The wavelength of the laser diode is modulated
by a sawtooth current signal. As a consequence of the double refraction caused by the birefringent crystal, the modulated light signal is refracted by the birefringent crystal
with two different light paths, therefore , a novel “Wavelength-modulated heterodyne light source” was proposed. The heterodyne light source can be made to a relatively small size and save much cost compared with known heterodyne light sources at present.
We first use of a quarter wave plate to validate the feasibility of the phase demodulation, then the novel heterodyne light source was applied to displacement
measurement based on one-dimensional or two-dimensional quasi-common optical path grating interferometry. We let the grating is moved by the piezoelectric, the optical phase variation which results from the grating moving will be measured by the lock-in amplifier, therefore, we can get the grating movement.
From experiment results, the resolution of the one-dimensional quasi-common optical path grating interferometry is 10 nm. The resolution in z-direction and y-direction of the two-dimensional quasi-common optical path grating
interferometry are about 10 nm and 20 nm. The sensitivity is 0.18°/nm.

關鍵字(中)

★ 外差光源
★ 位移量測
★ 外差干涉術
★ 繞射光柵

關鍵字(英)

★ heterodyne light source
★ displacement measurement
★ heterodyne interferometry
★ diffraction grating

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vi
表目錄 viii
第一章緒論 1
1.1研究背景 1
1.2文獻回顧 2
1.2.1外差干涉術之文獻回顧 2
1.2.2波長調制外差干涉術之文獻回顧 3
1.2.3外差光柵干涉術之文獻回顧 5
1.3研究目的 8
1.4章節簡介 8
第二章基礎理論 10
2.1外差干涉術 10
2.2波長調制外差干涉術 11
2.2.1雷射二極體 11
2.2.2雙折射晶體之波長調制外差光源 14
2.3光柵干涉術 18
2.3.1光柵位移引入繞射光相位變化 18
2.3.2光柵干涉術 21
2.4小結 22
第三章系統架構 23
3.1元件與儀器介紹 23
3.2新型波長調制外差光源應用於四分之一波片架構 25
3.3新型波長調制外差光源應用於一維準共光程光柵干涉儀架構 27
3.4新型波長調制外差光源應用於二維準共光程光柵干涉儀架構 31
3.5相位訊號處理架構 35
3.6小結 37
第四章實驗結果與討論 38
4.1四分之一波片相位解析量測實驗 38
4.2一維準共光程光柵干涉儀量測實驗 40
4.2.1長行程量測：45 m弦波及三角波運動 40
4.2.2中行程量測：10 m弦波及三角波運動 42
4.2.3小行程量測：1 m方波、弦波及三角波運動 44
4.2.4小行程量測：500 nm、100 nm、10 nm方波運動 46
4.2.5量測穩定度實驗 48
4.3二維準共光程光柵干涉儀量測實驗 50
4.3.1長行程量測：45 m弦波及三角波運動 50
4.3.2中小行程量測：10 m、1 m弦波及三角波運動 54
4.3.3小行程量測：1 m、500 nm、100 nm、10 nm方波運動 58
4.3.4量測穩定度實驗 65
4.4實驗討論 66
4.4.1量測解析度測試 66
4.4.2量測靈敏度測試 67
4.4.3量測速度測試 68
4.5小結 68
第五章誤差分析 70
5.1 系統誤差 70
5.1.1偏振片方位角引入的非線性誤差 71
5.1.2半波片方位角所引入的非線性誤差 73
5.1.3餘弦誤差 74
5.2 調制深度引入的週期性非線性誤差 75
5.3 隨機誤差 79
5.3.1 溫度變化造成調制深度變化引入誤差 79
5.3.2 環境振動 81
5.3.3 材料熱物性 81
5.3.4 電子雜訊 81
5.4 小結 82
第六章結論與未來展望 83
6.1 結論 83
6.2 未來展望 83
參考文獻 84

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指導教授

李朱育(Ju-yi Lee)

審核日期

2013-10-11

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