摘要(英) |
Sputtering is a process using energetic particles to sputter a surface used as a source of deposition material and/or to bombard a growing film to modify the film properties. It is widely used in the high-tech industries. It is a common practice to clean the target surface for target reuse. Because of its ease of use and effectiveness, sandblast is the preferred method for target cleaning. However, the byproducts of sandblasting such as dust and noise are grave occupational health concerns since noise causes hearing loss and dust is known to induce respiratory diseases. This study aims to evaluate the health effects of workers exposed to noise and dust in sputtering target sandblasting.
Workplace environmental monitoring is conducted to obtain the noise and dust background information of the sandblasting area. Physical examination on hearing capability and vital capacity are provided to the project participants. In addition, questionnaires are used to gather the personal information, life style, noise hazard awareness, dust hazard awareness, personal protective equipment use, self-described discomfort associated with noise and dust and related medical records, respiratory system illness of the participants. 84 participants are evenly divided into the control group and the exposure group with female employees as the minority in each group.
The workplace noise and dust level measurements are all within the legal limits imposed by the Council of Labor Affairs. However, employees working in the high noise-level areas with seniority tend to suffer more hearing loss. There is no significant relationship between respiratory discomforts and high dust concentration work areas or tasks. This is believed to be due to limited medical history of the participants. Based on the findings of this study, it can be concluded that training and proper use of personal protective equipment are the most important issues when dealing with noise and dust hazards of sandblasting of sputtering targets. |
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