共濺鍍鋁鍺薄膜之接合特性研究

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姓名

張家豪(Chia-hao Chang) 查詢紙本館藏

畢業系所

化學工程與材料工程學系

論文名稱

共濺鍍鋁鍺薄膜之接合特性研究
(Bonding Characteristics of Co-sputtering Aluminum-Germanium Thin Film)

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摘要(中)

在微電機封裝中利用鋁鍺薄膜共晶接合可達到好的接合強度和良好氣密性特性，共晶鋁鍺薄膜大多以雙層膜結構方式接合，但此雙層膜結構需藉由時間擴散達到均質共晶組成。本研究利用濺鍍機以共濺鍍的方式製備鋁鍺薄膜，其組成約為72.8 at.%的鋁及約為27.2 at.%的鍺，希望能藉由共濺鍍直接形成均質鋁鍺薄膜以達到良好的接合行為，本研究分析不同接合溫度、時間和壓力等參數影響共濺鍍鋁鍺薄膜的接合特性。
由結果可發現在低於熔點的接合溫度之接合特性與富鋁相的生成有極大關聯，尤其接合溫度劇烈影響富鋁相形貌，當接合溫度在400 oC、接合壓力0.3 MPa和接合時間30 min時可有最佳的接合剪切強度，原因可能為微結構出現由富鋁相形成之網狀結構而增強機械性質，而當接合溫度提升至500 oC後，卻因生成大面積的富鍺相而降低接合剪切強度。

摘要(英)

In MEMS packaging, aluminum-germanium eutectic bonding can achieve excellent bonding strength and good hermetic performance. Under many circumstances, using bi-layer aluminum/germanium thin film is the most common bonding approach, however it requires time and temperature to diffuse and to reach the homogeneous eutectic composition. This study used sputter technique to co-sputter aluminum-germanium thin film with the composition 72.8 at.% Al and 27.2 at.% Ge. This thesis investigated and analyzed the effect on the compositional variation and bonding strength under different parameters, such as bonding temperature, bonding pressure and bonding time.
The results showed that the formation of the Al-rich region and its occupying areas could greatly influence the bonding characteristics when the bonding condition was below eutectic temperature. Furthermore, under a bonding temperature of 400 oC, bonding pressure of 0.3 MPa and bonding time of 30 min the film exhibited the optimal shear strength due to the formation of network structure of aluminum rich regions that could enhance the mechanical properties. The bonding strength would be weakened by the formation of large area of Ge rich phase when raising the bonding temperature to 500 oC.

關鍵字(中)

★ 鋁鍺薄膜
★ 共濺鍍
★ 共晶接合

關鍵字(英)

★ Al-Ge Thin Film
★ Co-sputtered
★ Eutectic Bonding

論文目次

摘要…………………………………………………………………………………………..Ⅰ
Abstract………………………………………………………………………………………Ⅱ
目錄…………………………………………………………………………………………..Ⅲ
圖目錄………………………………………………………………………………………..Ⅴ
表目錄……………………………………………………………………………………….Ⅶ

第一章緒論 1
1.1 MEMS簡介 1
1.2 MEMS晶圓級封裝接合簡介 2
1.2.1陽極接合(Anodic bonding) 2
1.2.2融合接合(Fusion bonding) 4
1.1.3共晶接合(Eutectic bonding) 5
1.1.4金屬熱壓接合(Metal thermal compression bonding) 6
1.1.5黏著接合(Adhesive bonding) 7
1.1.6玻璃介質接合(Glass-frit bonding) 8
第二章文獻回顧 9
2.1 Al-Ge共晶系統簡介 9
2.2密封性封裝(Hermetic seal) 10
2.3共晶Al-Ge薄膜接合簡介 11
2.3.1共晶Al-Ge薄膜接合氣密性測試 11
2.3.2鋁鍺接合微結構……………………………………………………………..14
2.3.2熱穩定性之共晶Al-Ge薄膜接合 17
2.3.3 共晶Al-Ge薄膜接合之製程改良 18
2.3.4共晶Al-Ge薄膜不同接合條件之影響 21
2.4研究動機 24
第三章實驗方法 25
3.1磁控濺鍍系統簡介 25
3.2基材準備與鋁鍺薄膜共濺鍍製程 26
3.3共濺鍍Al-Ge薄膜接合製程 27
3.4共濺鍍Al-Ge薄膜接合剪切力測試 29
3.5共濺鍍Al-Ge薄膜接合實驗微結構分析 31
3.5.1 表面形貌與微結構………………………………………………………….31
3.5.1.1掃描式電子顯微鏡(Scanning Electron Microscopy, SEM) 31
3.5.1.2原子力學顯微鏡(Atomic Force Microscopy, AFM) 32
3.5.2 結晶行為…………………………………………………………………….33
3.5.2.1 X射線繞射儀(X-ray Diffraction, XRD) 33
3.5.3 組成與元素分布…………………………………………………………….34
3.5.3.1能量散佈分析儀(Energy Dispersive Spectrometer, EDS) 34
3.5.3.2 X射線光電子能譜儀(X-ray Photoelectron Spectroscopy, XPS) 34
3.5.3.3電子微探儀(Electron Probe Micro-Analyzer, EPMA) 35
第四章結果與討論 37
4.1初始共濺鍍鋁鍺薄膜之觀察 37
4.2共濺鍍鋁鍺薄膜之剪切測試結果 40
4.3共濺鍍鋁鍺薄膜之斷裂面觀察 43
4.4共濺鍍鋁鍺薄膜之剪切強度分析 54
第五章結論 59
參考文獻 60

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指導教授

吳子嘉(Albert T. Wu)

審核日期

2014-8-6

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