摘要(英) |
In this thesis, the optical module of the light-emitting diode (LED) scanning-type exposure device is designed and verified. The research targets are taken as:, half of the full-width half-maximum (FWHM) angle ≤4.0°, and the illumination uniformity ≥90%. For easy making and cost down, we replace ultraviolet light-emitting diode (UV-LED) with LED to design and verify.
First, we use a secondary optical lens which half of FWHM is 3.6° to function the light field of a LED. Then using the function of the light field, we research the LED array to find parameters of the better illumination uniformity which is ≥90%. Finally, we design the experiment to verify the results of simulation.
We use the function of the light field to get the illumination distribution on the work platform of exposure device. According the result, when the light distance is 3.5 cm and the light perpendicular hight is 16.0 cm, it is the better illumination uniformity. The experiment result verified that the illumination uniformity is 96.5%. The research result indicated that the research technology, which used in the LED scanning exposure device, could effectively apply in the printed circuit board exposure device to reach the commercial specifications in the UV-LED scanning exposure device. |
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