改善石墨烯轉印品質之研究

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姓名

林琨展(Kun-Zhan Lin) 查詢紙本館藏

畢業系所

能源工程研究所

論文名稱

改善石墨烯轉印品質之研究
(Research on improving the quality of graphene transfer process)

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摘要(中)

石墨烯是目前備受矚目的新興材料之一，因為其優異的導電性以及高穿透率，是一種可撓曲的透明導電薄膜，可望取代傳統透明導電膜如氧化銦錫(ITO)、氧化鋅鋁(AZO)等。疊層之後的石墨烯能夠有更低的片電阻值，疊層過程當中需要進行轉印，在轉印堆疊時疊層石墨烯容易殘留下轉印輔助層如PMMA等，為了解決有機物殘留問題，需要改善其轉印堆疊的手法。
本研究以一般銅箔進行傳統的疊層方式與直接石墨烯/銅箔疊層轉印方式進行堆疊，其所堆疊出的多層石墨烯在電性表現有些許趨勢，為了驗證直接石墨烯/銅箔疊層轉印法的可行性，利用原子力顯微鏡觀察銅箔表面分析不同銅箔的表面粗糙平整度；利用霍爾量測儀量測疊層石墨烯電性；利用拉曼光譜儀分析疊層石墨烯之品質。利用電鍍銅箔所生長之單層石墨烯比起一般銅箔有著較佳的品質，其片電阻值為426 Ω/sq；載子濃度為9.13×1012 cm-2 ；電子遷移率為1603 cm2/V-s，利用其低表面粗糙平整度與良好之電性進行直接石墨烯/銅箔轉印法堆疊，驗證了此疊層轉印法之可行性。

摘要(英)

Graphene is one of the highly anticipated new material, because of its excellent electrical conductivity and high transmittance. It is a flexible transparent conductive film, and it is expected to replace the conventional transparent conductive film such as indium tin oxide (ITO), aluminum zinc oxide (AZO) , etc.. Stacking graphene can get a lower sheet resistance value. Graphene need to be transferred in the lamination process. When graphene is transferred in the lamination process, the transfer assist layer such as PMMA, etc. is difficult to be removed completely. In order to solve the problem of residual organics, it is necessary to improve the method of graphene lamination process.
In this study, we use two lamination transfer method on the general copper foil. The electrical properties of stacked multi-layered graphene show a trend slightly. In order to verify the method of direct-graphene/copper foil lamination transfer, we use an atomic force microscope to analyze the surface roughness of copper foil; using Hall measurement instrument to measure the electrical property of graphene; using Raman spectroscopy instrument to analyze the quality of graphene. The the electrical property of graphene grown on electroplating copper foil is better than general copperfoil, its sheet resistance value is 426 Ω / sq; carrier concentration is 9.13 × 1012 cm-2 ; mobility is 1603 cm2 / V-s .With the low surface roughness and good electrical property of graphene grown on electroplating copper foil, we verify the feasibility of the laminate transfer method.

關鍵字(中)

★ 石墨烯
★ 轉印

關鍵字(英)

★ graphene
★ transfer

論文目次

摘要 i
Abstract ii
致謝 iii
目錄 iv
圖目錄 vii
表目錄 x
第一章緒論 1
1-1 前言 1
1-2 研究動機 3
1-3 研究架構 4
第二章基礎理論文獻回顧 5
2-1 石墨烯 5
2-2 透明導電薄膜 9
2-3 石墨烯作為透明導電膜 11
2-4 石墨烯製備方法 14
2-4-1 機械剝離法 14
2-4-2 碳化矽磊晶法 15
2-4-3 氧化石墨烯還原法 16
2-4-4 化學氣相沉積法 17
第三章實驗方法與儀器介紹 21
3-1基本實驗流程 21
3-1-1 電漿濺鍍剝離銅箔 21
3-1-2 化學氣相沉積法成長石墨烯 24
3-2 轉印石墨烯之方法 26
3-2-1 roll-to-roll轉印法 26
3-2-2 熱解膠帶轉印法 27
3-2-3 clean-lifting transfer轉印法 28
3-3 分析儀器 30
3-3-1 四點探針 30
3-3-2 拉曼光譜儀 30
3-3-3 光學顯微鏡 34
3-3-4 可見光光譜儀 34
3-3-5 霍爾量測儀 35
3-3-6 原子力顯微鏡 35
第四章結果與討論 37
4-1 轉印疊層石墨烯 37
4-1-1 傳統轉印石墨烯與疊層方式 38
4-1-2 以成長後之石墨烯/銅箔直接疊層轉印石墨烯之方式 39
4-2 成長石墨烯 41
4-2-1 疊層石墨烯之霍爾量測電性分析 43
4-2-2 疊層石墨烯之拉曼量測分析 45
4-3 電鍍剝離銅箔之表面粗糙度分析 47
4-4 以電鍍剝離銅箔成長石墨烯 51
4-4-1 疊層石墨烯之霍爾量測電性分析 51
4-4-2 疊層石墨烯之拉曼量測分析 54
4-5 電鍍銅箔與一般銅箔之量測比較 56
4-5-1 一般銅箔與電鍍銅箔之電性比較 56
4-5-2 電鍍銅箔與一般銅箔之拉曼光譜量測 58
4-5-3 兩種銅箔之電性量測數據量化比較 61
4-5-4 堆疊石墨烯時產生之問題影響 64
第五章結論 65
參考文獻 67

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指導教授

郭倩丞(Chien-Cheng Kuo)

審核日期

2016-8-18

推文