博碩士論文 102226031 詳細資訊




以作者查詢圖書館館藏 以作者查詢臺灣博碩士 以作者查詢全國書目 勘誤回報 、線上人數:13 、訪客IP:75.101.243.64
姓名 林育賢(Yu-Xen Lin)  查詢紙本館藏   畢業系所 光電科學與工程學系
論文名稱 動態干涉儀應用於量測薄膜之光學常數
(Optical constants of thin-film measurement by a vibration-insensitive interferometer)
相關論文
★ 半導體雷射控制頻率★ 比較全反射受挫法與反射式干涉光譜法在生物感測上之應用
★ 193nm深紫外光學薄膜之研究★ 超晶格結構之硬膜研究
★ 交錯傾斜微結構薄膜在深紫外光區之研究★ 膜堆光學導納量測儀
★ 紅外光學薄膜之研究★ 成對表面電漿波生物感知器應用在去氧核糖核酸及微型核糖核酸 雜交反應檢測
★ 成對表面電漿波生物感測器之研究及其在生醫上的應用★ 探討硫化鎘緩衝層之離子擴散處理對CIGS薄膜元件效率影響
★ 以反應性射頻磁控濺鍍搭配HMDSO電漿聚合鍍製氧化矽摻碳薄膜阻障層之研究★ 掃描式白光干涉儀應用在量測薄膜之光學常數
★ 量子點窄帶濾光片★ 以量測反射係術探測光學薄膜之特性
★ 嵌入式繼光鏡顯微超頻譜影像系統應用在口腔癌切片及活體之設計及研究★ 軟性電子阻水氣膜之有機層組成研究
檔案 [Endnote RIS 格式]    [Bibtex 格式]    [相關文章]   [文章引用]   [完整記錄]   [館藏目錄]   [檢視]  [下載]
  1. 本電子論文使用權限為同意立即開放。
  2. 已達開放權限電子全文僅授權使用者為學術研究之目的,進行個人非營利性質之檢索、閱讀、列印。
  3. 請遵守中華民國著作權法之相關規定,切勿任意重製、散佈、改作、轉貼、播送,以免觸法。

摘要(中) 此篇論文研究是以架設偏振式Twyman–Green干涉儀,並搭配4D Technology公司出產的偏振像素攝影機,成功完成動態干涉量測系統之架設,量測功能可量測反射光譜與反射相位光譜,並透過窄帶濾光片選取所需的量測波長,得到多波長的量測資訊來分析。系統之反射光譜量測,其誤差為0.6 %,標準差為±0.172 %,反射相位光譜,其量測結果之誤差為1.26 %,標準差為±0.085 rad。
動態干涉儀利用程式上的一些修正,可以減少對於元件設備的品質,像是在光源強度不均勻的情況下與元件自我干涉也能透過程式校正,還原待測物的量測結果。而動態干涉儀使用的相位延遲元件,可透過Intensity Lissajou Curves橢圓的傾角來調整1/4波長相位延遲片的快慢軸角度,以修正參考光與待測光可被極化為圓偏振光,從而減少橢圓極化光的產生,進而減少相位計算中fringe print-through誤差的產生。因此利用以建構好的演算程式,可以將品質所造成的光學現象加以修正與調整,得以降低動態干涉儀在光學元件上使用的成本。
薄膜量測與橢圓偏振儀的量測結果作比較,將動態干涉儀所量測的反射光譜及反射相位光譜,透過simplex演算法擬合薄膜的厚度與折射率,即使在光學桌無防震狀態中量測,其量誤差皆小於1%。
摘要(英) This article aims to set up a dynamic (vibration-insensitive) interferometry based on a polarized Twyman-Green interferometry with a polarization pixel camera produced 4D Technology Corporation.
In this research, detailed analyses of the uniformity white-light source and self-interference effect illustrates how these improvements increase the accuracy of the thin-film measurement. Through intensity Lissajou curves, the phase shift of wave-plate can be corrected to reduce fringe print-through error in the phase calculation process. The dynamic interferometry is capable to measure reflection amplitude and phase for mutli-wavelength by selecting different narrow band-pass filter. The reflection spectrum error of Ta2O5 thin-film is 0.6 % ( 0.172 %) and the reflection phase error is 1.26 % (0.085 rad).
An application of dynamic interferometry on transparent thin-film measurement was achieved. The measurements are compared with spectroscopic ellipsometry results (SOPRA GES 5), and for both film thickness and refractive index, the differences are within 1% of the ellipsometry measurement.
關鍵字(中) ★ 干涉儀
★ 四步相移
★ 光學常數
關鍵字(英) ★ Interferometer
★ phase shift
★ Optical constants
論文目次 摘要 I
Abstract II
致謝 III
第一章 緒論 1
1-1 前言 1
1-1-1 相移式干涉儀 1
1-1-2 動態干涉量測技術 2
1-2 研究動機 5
1-3 本文架構 6
第二章 理論 7
2-1 干涉儀理論 7
2-1-1 相位移干涉儀理論 8
2-1-2 動態干涉儀 12
2-2 薄膜理論 13
2-2-1 單層膜的反射與透射 14
2-2-2 單層膜與多層膜的膜矩陣 17
2-2-3單層膜與多層膜的反射率、穿透率及相位 19
2-3 演算法-Simplex最佳化求解 20
第三章 實驗架構與研究方法 25
3-1 實驗架構 25
3-2 研究方法 27
3-2-1反射光譜量測 27
3-2-2反射相位光譜量測 29
3-3 橢圓偏振儀 31
第四章 結果與討論 35
4-1系統校正 35
4-1-1強度校正 35
4-1-2相位校正 38
4-2實驗結果與討論 42
第五章 結論 46
參考文獻 48
參考文獻 1. R. Smythe and R. Moore, "Instantaneous Phase Measuring Interferometry", Opt. Eng. 23(4), 361-364 (1984).
2. Andrea Hettwer, Jochen Kranz, and Johannes Schwider. "Three channel phase-shifting interferometer using polarization-optics and a diffraction grating", Opt. Eng. 39(4), 960-966 (2000).
3. James E. Millerd, Neal J. Brock, John B. Hayes and James C. Wyant, "Instantaneous phase-shift point-diffraction interferometer", Proc. SPIE 5531, Interferometry XII: Techniques and Analysis, 264-272 (2004)
4. Neal Brock, John Hayes, Brad Kimbrough, James Millerd, Michael North-Morris, Matt Novak and James C. Wyant, " Dynamic Interferometry", SPIE Vol. 5875, page 58750F-1-10 (2005)
5. R. M. A. Azzam and N. M. Bashara, "Ellipsometry and Polarized Light", Elsevier Science Pub Co (1987)
6. Aqili, A. K. S. and A. Maqsood, "Determination of thickness, refractive index, and thickness irregularity for semiconductor thin films from transmission spectra", Applied Optics 41(1), 218-224 (2002)
7. Cardin, J. and D. Leduc "Determination of refractive index, thickness, and the optical losses of thin films from prism-film coupling measurements", Applied Optics 47(7), 894-900 (2008)
8. Diao, J. and D. W. Hess "Refractive index measurements of films with biaxial symmetry 2 Determination of film thickness and refractive indices using polarized transmission spectra in the transparent wavelength range", Journal of Physical Chemistry B 109(26), 12819-12825. (2005)
9. Ghim, Y. S. and S. W. Kim "Fast, precise, tomographic measurements of thin films", Applied Physics Letters 91(9) (2007)
10. Kim, D., S. Kim, et al. "Measurement of the thickness profile of a transparent thin film deposited upon a pattern structure with an acousto-optic tunable filter", Optics Letters 27(21), 1893-1895 (2002)
11. Kim, S. W. and G. H. Kim "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry", Applied Optics 38(28), 5968-5973 (1999)
12. Kutavichus, V. P., V. V. Filippov, et al. "Determination of optical parameters and thickness of weakly absorbing thin films from reflectance and transmittance spectra", Applied Optics 45(19), 4547-4553 (2006)
13. MartinezAnton, J. C. and E. Bernabeu "Simultaneous determination of film thickness and refractive index by interferential spectrogoniometry", Optics Communications 132(3-4), 321-328 (1996)
14. Nenkov, M. R. and T. G. Pencheva, "Phase thickness approach for determination of thin film refractive index dispersion from transmittance spectra", European Physical Journal-Applied Physics 42(3), 219-228 (2008)
15. Pradeep, J. A. and P. Agarwal, "Determination of thickness, refractive index, and spectral scattering of an inhomogeneous thin film with rough interfaces", Journal of Applied Physics 108(4), (2010)
16. Pristinski, D., V. Kozlovskaya, et al., "Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry", Journal of the Optical Society of America a-Optics Image Science and Vision 23(10), 2639-2644 (2006)
17. Maitreyee Roy, Ian Cooper, Peter Moore, Colin J. R. Sheppard, and Parameswaran Hariharan, "White-light interference microscopy: effects of multiple reflections within a surface film", Opt. Express 13, 164-170 (2004)
18. H. M. Shabana, "Determination of film thickness and refractive index by interferometry", Polymer Testing 23(6), 695-702 (2005)
19. B. Kimbrough, J. Millerd, J. Wyant, J. Hayes, "Low Coherence Vibration Insensitive Fizeau Interferometer", Proc. SPIE 6292, 62920F (2006)
20. J. Millerd, N. Brock, J. Hayes, B. Kimbrough, M. Novak, M. North-Morris and J. C. Wyant, "Modern Approaches in Phase Measuring Metrology", Proc. of SPIE 5856, pp. 14-22 (2005)
21. N. Brock, J. Hayes, B. Kimbrough, J. Millerd, M. North-Morris, M. Novak and J. C. Wyant, "Dynamic interferometry", Proc. SPIE 5875, 58750F (2005)
22. Y.-S. Ghim, and S.-W. Kim "Fast, precise, tomographic measurements of thin films", Appl. Phys. Lett. 91(9), 091903-091903-3 (2007)
23. L. L. Deck, "Fourier-transform phase-shifting interferometry", Appl. Opt. 42(13), 2354–2365 (2003)
24. Daniel Malacara , "Optical Shop Testing," Third Edition, Wiley-Interscience A John Wiley & Sons, Inc. (2007)
25. 李正中,《薄膜光學與鍍膜技術》,第八版,藝軒圖書出版社,台北,ISBN 978-986-394-014-2 (2016)
26. 張耀仁,《C++程式設計》,初版,碁峰資訊出版社,臺北市,ISBN 986-421-475-6 (2004)
27. Kai Wu, Cheng-Chung Lee, Neal J. Brock, and Brad Kimbrough, "Multilayer thin-film inspection through measurements of reflection coefficients", Opt. Lett. 36, 3269-3271 (2011)
28. Seung-Woo Kim and Gee-Hong Kim, "Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry", Appl. Opt. 38, 5968-5973 (1999)
29. C T Farrell and M A Player, "Phase-step insensitive algorithms for phase-shifting interferometry", Meas. Sci. Technol. 5, 648 (1994)
30. B. Kimbrough, "Correction of Errors in Polarization Based Dynamic Phase Shifting Interferometers", International Journal of Optomechatronics 8(4), 304–312 (2014).
31. John Hayes and James Millerd, "Dynamic Interferometry: Getting Rid of the Jitters", PHOTONICS HANDBOOK (2006)
32. Pramod Rastogi, "Digital Optical Measurement Techniques and Applications", ISBN-13: 978-1-60807-806-6 (2015)
33. Crane R., "Interference Phase Measurement," Appl. Opt. 8, 538-542 (1969).
34. J. H. Bruning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, "Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and Lenses," Appl. Opt. 13, 2693-2703 (1974)
35. J. C. Wyant, "Use of an ac heterodyne lateral shear interferometer with real–time wavefront correction systems," Appl. Opt. 14, 2622-2626 (1975)
36. G. W. Johnson, D. C. Leiner, and D. T. Moore, “Phase-locked Interferometry,” Proc. SPIE 126, 152–160 (1977).
37. J. W. Hardy, J. E. Lefebvre, and C. L. Koliopoulos, "Real-time atmospheric compensation," J. Opt. Soc. Am. 67, 360-369 (1977)
38. Stumpf K. D., "Real-time interferometer," Opt. Eng. 18(6), 648 (1979)
39. Bruning, J. H., ‘‘Fringe Scanning Interferometers,’’ in Optical Shop Testing, D. Malacara Ed., 1st Edition, Wiley, New York, (1978)
40. N. A. Massie, R. D. Nelson, and S. Holly, "High-performance real-time heterodyne interferometry," Appl. Opt. 18, 1797-1803 (1979)
41. J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, R. Spolaczyk, and K. Merkel, "Digital wave-front measuring interferometry: some systematic error sources," Appl. Opt. 22, 3421-3432 (1983)
42. Daniel Malacara, "Analysis of the interferometric Ronchi test," Appl. Opt. 29, 3633-3637 (1990)
43. K. G. Larkin and B. F. Oreb, "Design and assessment of symmetrical phase-shifting algorithms," J. Opt. Soc. Am. A 9, 1740-1748 (1992)
44. J. Schwider, O. Falkenstoerfer, H. Schreiber, A. Zoeller, and N. Streibl, "New compensating four-phase algorithm for phase-shift interferometry," Opt. Eng. 32, 1883–1885 (1993).
45. Y. Surrel, "Phase stepping: a new self-calibrating algorithm," Appl. Opt. 32, 3598-3600 (1993)
46. Yves Surrel, "Design of algorithms for phase measurements by the use of phase stepping," Appl. Opt. 35, 51-60 (1996)
47. Yves Surrel, "Additive noise effect in digital phase detection," Appl. Opt. 36, 271-276 (1997)
48. Yves Surrel, "Design of phase-detection algorithms insensitive to bias modulation," Appl. Opt. 36, 805-807 (1997)
49. Kenichi Hibino, Kieran G. Larkin, Bob F. Oreb, and David I. Farrant, "Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts: reply to comment," J. Opt. Soc. Am. A 15, 1234-1235 (1998)
50. Kenichi Hibino, "Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry," Appl. Opt. 36, 2084-2093 (1997)
51. Kenichi Hibino, Bob F. Oreb, David I. Farrant, and Kieran G. Larkin, "Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts," J. Opt. Soc. Am. A 14, 918-930 (1997)
52. Kenichi Hibino, Ryohei Hanayama, Jan Burke, and Bozenko F. Oreb, "Tunable phase-extraction formulae for simultaneous shape measurement of multiple surfaces with wavelength-shifting interferometry," Opt. Express 12, 5579-5594 (2004)
53. Daniel Malacara-Doblado and Benito V. Dorrı́o, "Family of detuning-insensitive phase-shifting algorithms," J. Opt. Soc. Am. A 17, 1857-1863 (2000)
54. Daniel Malacara-Doblado, Benito V. Dorrío, and Daniel Malacara-Hernández, "Graphic tool to produce tailored symmetrical phase-shifting algorithms," Opt. Lett. 25, 64-66 (2000)
55. Yucong Zhu and Takashi Gemma, "Method for designing error-compensating phase-calculation algorithms for phase-shifting interferometry," Appl. Opt. 40, 4540-4546 (2001)
指導教授 李正中(Cheng-Chung Lee) 審核日期 2016-8-29
推文 facebook   plurk   twitter   funp   google   live   udn   HD   myshare   reddit   netvibes   friend   youpush   delicious   baidu   
網路書籤 Google bookmarks   del.icio.us   hemidemi   myshare   

若有論文相關問題,請聯絡國立中央大學圖書館推廣服務組 TEL:(03)422-7151轉57407,或E-mail聯絡  - 隱私權政策聲明