Photocatalytic Study on Indium Tantalum Oxide Thin Film Deposited by Sputtering

以作者查詢圖書館館藏

、以作者查詢臺灣博碩士

、以作者查詢全國書目

、勘誤回報

、線上人數：65

、訪客IP：18.191.26.82

姓名

薛柏暉(Po-Hui Hsueh) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

(Photocatalytic Study on Indium Tantalum Oxide Thin Film Deposited by Sputtering)

相關論文

★ 使用實驗計劃法求得印刷電路板微鑽針最佳鑽孔參數	★ 滾針軸承保持架用材料之電鍍氫脆研究
★ 強制氧化及熱機處理對鎂合金AZ91D固相回收製程之研究	★ 滾針軸承保持架圓角修正之有限元素分析
★ 透過乾式蝕刻製作新型鍺全包覆式閘極電晶體元件	★ 窗型球柵陣列構裝翹曲及熱應力分析
★ 冷軋延對ZK60擠製材的拉伸與疲勞性質之影響	★ 熱引伸輔助超塑成形製作機翼整流罩之設計及分析
★ 超塑性鋁合金5083用於機翼前緣整流罩之研究	★ 輕合金輪圈疲勞測試與分析
★ 滾針軸承保持架之有限元分析	★ 鎂合金之晶粒細化與超塑性研究
★ 平板式固態氧化物燃料電池穩態熱應力分析	★ 固態氧化物燃料電池連接板電漿鍍膜特性研究
★ 7XXX系鋁合金添加Sc之顯微組織與機械性質研究	★ 高延性鎂合金之特性及成形性研究

檔案

[Endnote RIS 格式]

[Bibtex 格式]

[相關文章]

[文章引用]

[完整記錄]

[館藏目錄]

[檢視]

[下載]

本電子論文使用權限為同意立即開放。
已達開放權限電子全文僅授權使用者為學術研究之目的，進行個人非營利性質之檢索、閱讀、列印。
請遵守中華民國著作權法之相關規定，切勿任意重製、散佈、改作、轉貼、播送，以免觸法。

摘要(中)

本研究使用濺鍍機鍍製三種製成參數之氧化銦鉭薄膜，其三種製成分別為氧化鉭5奈米氧化銦7奈米疊層(5-7奈米)、氧化鉭10奈米氧化銦14奈米疊層(10-14奈米)以及雙鈀共鍍，鍍膜完後薄膜以不同溫度條件快速退火爐，希望藉由熱處理方式改善其微結構，讓薄膜可以發揮光觸媒效果。薄膜製程結束後，我們使用X光繞射儀(XRD)及能量散佈分析儀(EDS)發現在5-7奈米及10-14奈米製程之薄膜中出現氧化銦鉭之結晶相，然而共鍍製程之薄膜中並沒有出現其結晶相。文獻指出結晶氧化銦鉭可以在紫外光及可見光照射下發揮光觸媒效果，這裡我們著重於測試快速退火過後之薄膜在可見光照下其在水中分解亞甲基藍的光降解能力，其5-7奈米及10-14奈米製程之薄膜在六小時可見光照射下可以達到45%之光降解效率。使用分光光譜儀(UV-Vis-NIR)結果可以計算出薄膜之能隙大小，並且會根據計算結果討論其光觸媒效果機制，其與異質連接半導體之電子電洞分離機制相似。

摘要(英)

Indium tantalum oxide thin film was deposited by sputtering using three different designs: 5-7 and 10-14 nm alternative layers of In2O3 and Ta2O5, and co-sputtering of In2O3 and Ta2O5. Then as-deposited films were rapid annealed at different temperatures to assess the thermal effects on microstructures and photocatalytic functions. Results from XRD and EDS indicates that crystalline InTaO4 emerges in 5-7 and 10-14 nm stacks of films but absent in the co-sputtered films. Since crystalline InTaO4 is capable of photocatalysis under both ultraviolet and visible light, we particularly tested the annealed films in water to degrade methylene blue under visible light. The photo-induced degradation on methylene blue by 5-7 and 10-14 nm stacks can reach 45% after 6-hour continuous exposure. Using UV-Visible-NIR spectroscopy, we can estimate the optical band gaps in these annealed films and from these estimations, a mechanism for the photocatalysis is discussed following. This mechanism is similar to other electron-hole separation and transfer across the heterogeneous junctions in semiconductors.

關鍵字(中)

★ 氧化銦鉭
★ 光觸媒
★ 快速退火
★ 分光光譜儀
★ 能隙

關鍵字(英)

★ InTaO4
★ photocatalysis
★ rapid thermal annealing
★ UV-Visible-NIR spectrum
★ optical band gap

論文目次

摘要 i
ABSTRACT ii
ACKNOWLEDGEMENT iii
CONTENT iv
LIST OF FIGURE vi
LIST OF TABLE viii
CHAPTER 1 INTRODUCTION 1
1.1 Introduction to Photocatalysis 1
1.2 Introduction to InTaO4 3
1.3 Plasma Enhanced Deposition Process 7
1.4 Objectives 9
CHAPTER 2 THEORIES AND METHODS 10
2.1 Fabrication Process Devices 10
2.1.1 Reactive Magnetron Sputter 10
2.1.2 Rapid Thermal Annealing 10
2.2 Characterization Measure Instruments 11
2.2.1 Thickness and Deposition Rate 11
2.2.2 Structure and Elemental Conposition 12
2.2.3 Transmission Electronic microsopy 13
2.2.4 Optical Measurement 14
2.3 Photocatalyst Function Test 16
2.3.1 Contact Angle 16
2.3.2 Photodegradation 17
CHAPTER 3 EXPERIMENTS 18
3.1 Experimental Procedure 18
3.2 Process Parameters of Sputtering 20
CHAPTER 4 RESULTS AND DISCUSSION 22
4.1 Deposition Rate 22
4.2 X-ray Diffraction 23
4.3 Scanning Electron Microscope and Energy Dispersive Spectrometer 25
4.4 UV-Vis-NIR Spectra and Optical Band Gap Estimate 27
4.5 Contact Angle 31
4.6 Photo-degradation Test 32
4.7 Some Discussions 33
CHAPTER 5 CONCLUSION 38
Reference 39

參考文獻

1. M. Pelaez, N. T. Nolan, S. C. Pillai, M. K. Seery, P. Falaras, A. G. Kontos, P. S. M. Dunlop, J. W. J. Hamiton, J. A. Byrne, K. O′Shea, "A review on the visible light active titanium dioxide photocatalysts for environmental applications," Appl. Catal., B, 125:331-349, 2012.
2. P. Evans, D. W. Sheel, "Photoactive and antibacterial TiO2 thin on stainless steel," Surf. Coat. Technol., 201(22-23):9319-9324, 2007.
3. W. S. Kou, P. H. Ho, "Solar photocatalytic decolorization of methylene blue in water," Chemosphere, 45(1):77-83, 2001.
4. N. Getoff, "Purification of drinking water by irradiation. A review," Proc. Indian Acad. Sci. (Chem. Sci.), 105(6):373-391, 1993.
5. H. Hidaka, "Photodegradation of surfactants with TiO2 semiconductor for the environmental wastewater treatmeant," Proc. Indian Acad. Sci. (Chem. Sci.), 110(3):215-228, 1998.
6. X. Z. Li, F. B. Li, C. L. Yang. W. K. Ge, "Photocatalytic activity of WOx - TiO2 under visible light irradiation," J. Photochem. Photobiol. A, 141(2-3):209-217, 2001.
7. S. D. Sharma, K. K. Saini, C. Kant, C. P. Sharma, S. C. Jain, "Photodegradation of dye pollutant under UV light by nano-catalyst doped titania thin films," Appl. Catal. B, 84(1-2):233-240, 2008.
8. T. Lindgren, J. M. Mwabora, E. Avendaño, J. Jonsson, A. Hoel, C.-G. Granqvist, S.-E. Lindquist, "Photoelectrochemical and optical properties of nitrogen doped titanium dioxide films prepared by reactive DC magnetron sputtering," J. Phys. Chem. B, 107(24):5709-5716, 2003.
9. L. Wan, J. F. Li, J. Y. Feng, W. Sun, Z. Q. Mao, "Anatase TiO2 with 2.2 eV band gap prepared by micro-arc oxidation," Mater. Sci. Eng., B, 139(2-3):216-220, 2007.
10. M. Miyauchi, A. Nakajima, T. Watanabe, K. Hashimoto, "Photocatalysis and photoinduced hydrophilicity of various metal oxide thin films," Chem. Mater., 14(6): 2812-2816, 2002.
11. O. Harneit, H. Müller-Buschbaum, "InTaO4 and GaTaO4 with ordered and unordered metal distribution," J. Alloys Compd., 194(1):101-103, 1993.
12. Z. G. Zou, J. H. Ye, H. Arakawa, "Structural properties of InNbO4 and InTaO4: correlation with photocatalytic and photophysical properties," Chem. Phys. Lett., 332(3-4): 271-277, 2000.
13. Z. G. Zou, J. H. Ye, H. Arakawa, "Photophysical and photocatalytic properties of InMO4 (M = Nb5+, Ta5+) under visible light irradiation," Mater. Res. Bull., 36(7-8):1185-1193, 2001.
14. G. L. Li, Z. Yin, "Theoretical insight into the electronic, optical and photocatalytic properties of InMO4 (M = V, Nb, Ta) photocatalysts," Phys. Chem. Chem. Phys., 13(7):2824-2833, 2011.
15. Z. G. Zou, J. H. Ye, K. Sayama, H. Arakawa, "Direct splitting of water under visible light irradiation with an oxide semiconductor photocatalyst," Nature, 414(6864):625-627, 2001.
16. J. Ye, Z. Zou, H. Arakawa, M. Oshikiri, M. Shimoda, A. Matsushita, T. Shishido, "Correlation of crystal and electronic structures with photophysical properties of water splitthing photocatalysts InMO4 (M = V5+, Nb5+, Ta5+)," J. Photochem. Photobiol. A, 148(1-3):79-83, 2002.
17. R. Ullah, H. Q. Sun, H. M. Ang, M. O. Tade, S. B. Wang, "Visible light photocatalytic degradation of organics on nanoparticles of bi-metallic oxides," Sep. Purif. Technol., 89:98-106, 2012.
18. Z. Y. Wang, H. C. Chou, J. C. S. Wu, D. P. Tsai, G. Mul, "CO2 photoreduction using NiO/InTaO4 in optical-fiber reactor for renewable energy," Appl. Catal. A, 380(1-2):172-177, 2010.
19. C. W. Tsai, H. M. Chen, R. S. Liu, K. Asakura, T. S. Chan, "Ni@NiO core-shell structure-modified nitrogen-doped IntTO4 for solar-driven highly efficient CO2 reduction to methanol reduction to methanol," J. Phys. Chem. C, 115(20):10180-10186, 2011.
20. Z. Zou, J. Ye, H. Arakawa, "Potocatalytic behavior of a new series of In0.8M0.2TaO4(M = Ni, Cu, Fe) photocatalysts in aqueous solutions," Catal. Lett., 75(3-4):209-213, 2001.
21. A. Abrutis, L. Parafianovic, V. Kazlauskiene, V. Kubilius, G. Sauthier, A. Figueras, "Atmospheric pressure chemical vapour deposition and characterisation of crystalline InTaO4, InNbO4 and InVO4 coatings," Surf. Coat. Technol., 204(23):3864-3870, 2010.
22. V. Rico, C. Lopez, A. Borras, J. P. Espinos, A. R. Gonzalez-Elipe, "Effect of visible light on the water contact angles on illuminated oxide semiconductors other than TiO2," Sol. Energy Mater. Sol. Cells, 90(17):2944-2949, 2006.
23. T. Yoshida, H. Toyoyama, I. Umezu, A. Sugimura, "InTaO4-based nanostructures synthesized by reactive pulsed laser ablation," Appl. Phys. A, 93(4):961-966, 2008.
24. H. C. Chen, H. C. Chou, J. C. S. Wu, H. Y. Lin, "Sol-gel prepared InTaO4 and its photocatalytic characteristics," J. Mater. Res., 23(5):1364-1370, 2008.
25. Y. C. Chiou, U. Kumar, J. C. S. Wu, "Photocatalytic splitting of water on NiO/InTaO4 catalysts prepare by innovative sol-gel method," Appl. Catal. A, 357(1):73-78, 2009.
26. K. Maruta, H. Kawakami, K. Maki, "Simply controlled growth condition of thin films of InTaO4(111) on MgO(001) substrates by Ar ion beam sputtering," Jpn. J. Appl. Phys., Part 1, 46(2):774-776, 2007.
27. H. Kawakami, K. Maki, "Initial growth stage of InTaO4 films deposited on MgO(001) substrates together with assisting O2-ion-beam by Ar-ion-beam sputtering of Ta target partly covered with in sheets," Vacuum, 82(1):95-99, 2007.
28. J. H. Hsieh, C. C. Chang, C. Li, S. J. Liu, Y. K. Chang, “Effects of Ag contents on antibacterial behaviors of TaON-Ag nanocomposite thin films,” Surf. Coat. Technol., 205:S337-S340, 2010.
29. J. Tauc, R. Grigorovici, A. Vancu, “Optical Properties and Electronic Structure of Amorphous Germanium,” Phys. Status. Solidi., 15(2):627-637, 1966.
30. J. Tauc, “Optical Properties and Electronic Structure of Amorphous Ge and Si,” Mater. Res. Bull., 3:37-46, 1968.
31. H. Tang, K. Prasad, R. Sanjines, P.E. Schmid, F. Levy, “Electrical and Optical Properties of TiO2 Anatase Thin Films,” J. Appl. Phys., 75(4):2042-2047, 1994.
32. M. M. Rahman, K. M. Krishna, T. Soga, T. Jimba, M. Umeno, “Optical Properties and X-Ray Photoelectron Spectroscopic Study of Pure and Pb-Doped TiO2 Thin Films,” J. Phys. Chem. Solid., 60(2):201-210, 1999.
33. P. Sharma, M. Vashistha, I. P. Jain,” Optical Properties of Ge20Se80-XBix Thin Films,” J. Optoelect. Adv. Mater., 7(5):2647-2654, 2005.
34. J. Yu, J. Xiong, B. Cheng, S. Liu, “Fabrication and Characterization of Ag–TiO2 Multiphase Nanocomposite Thin Films with Enhanced Photocatalytic Activity,” Appl. Catal. B, 60(3-4):211–221, 2005.
35. J. R. Bellingham, W. A. Phillips, C. J. Adkins, “Electrical and Optical Properties of Amorphous Indium Oxide,” J. Phys.: Condens. Matter, 2:6207-6221, 1990.
36. J. M. Heintz, J. J. M. Besson, L. Rabardel, J. P. Bonnet, "Grain-growth and densification study of beta-Ta2O5," Ceram. Int., 18(4):263-269, 1992.
37. K. H. Min, R. Sinclair, I. S. Park, S. T. Kim, U. I. Chung, "Crystallization behaviour of ALD-Ta2O5 thin films: the application of in-situ TEM," Philos. Mag., 85(18):2049-2063, 2005.
38. F. O. Adurodija, L. Semple, R. Bruning, "Crystallization process and electro-optical properties of In2O3 and ITO thin films," J. Mater. Sci., 41(21): 7096-7102, 2006.
39. M. Miyauchi, N. Kieda, S. Hishita, T. Mitsuhashi, A. Nakajima, T. Watanabe, K. Hashimoto, "Reversible wettability control of TiO2 surface by light irradiation," Surf. Sci., 511(1-3): 401-407, 2002.
40. N. Sakai, A. Fujishima, T. Watanabe, K. Hashimoto, "Enhancement of the photoinduced hydrophilic conversion rate of TiO2 film electrode surfaces by anodic polarization," J. Phys. Chem. B, 105(15): 3023-3026, 2001.
41. R. Ullah, H. Q. Sun, S. B. Wang, H. M. Ang, M. O. Tade, "Wet-Chemical Synthesis of InTaO4 for Photocatalytic Decomposition of Organic Contaminants in Air and Water with UV-vis Light," Ind. Eng. Chem. Res., 51(4):1563-1569, 2012.

指導教授

李雄(Shyong Lee)

審核日期

2016-8-19

推文