以噴塗技術沉積有機半導體薄膜：形貌分析及其於有機場效應電晶體元件應用

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姓名

許瀚文(Han-wen Hsu) 查詢紙本館藏

畢業系所

化學工程與材料工程學系

論文名稱

以噴塗技術沉積有機半導體薄膜：形貌分析及其於有機場效應電晶體元件應用
(Spray Coating Organic Semiconducting Thin Film: Morphology Analysis and Organic Field Effect Transistors Application)

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摘要(中)

本研究使用噴塗(spray-coating)技術沉積 poly[(9,9-dioctylfluorenyl-2,7 -diyl)-co-bithiophene] (F8T2)共軛高分子、6,13-bis(triisopropylsilylethynyl) -pentacene (TIPS-PEN)有機小分子以及poly-(selenophene-alt-3,6-dithophene -2-yl-2,5-bis-(2-hexyldecyl)-2,5-dihydro-pyrrolo[3,4-c]pyrrole-1,4-dione) (PSeDPP)共軛高分子作為有機半導體材料，製作於以矽烷(silane)處理過之SiO2/Si基板上，再以蒸鍍金作為電極，建構為底閘極頂接觸(bottom-gate top-contact)之有機場效應電晶體元件(organic field effect transistors; OFETs)。根據改變不同的噴塗參數(如噴塗壓力、流量、噴塗距離及噴塗時間等)及以不同親水性之矽烷處理或製作圖案化矽烷於基材上，用以探討其對半導體薄膜表面形態和電氣特性影響。經由選用最佳化參數所製作之元件，P型半導體F8T2與TIPS-PEN分別可達電洞遷移率(hole mobility)為0.02 cm2 V-1 s-1和1.18 cm2 V-1 s-1；雙極性半導體PSeDPP可同時達5 cm2 V-1 s-1及1.13 cm2 V-1 s-1之電洞遷移率和電子遷移率(electron mobility)，並皆有超過102之電流開關比(Ion/Ioff)。最後使用噴塗法試產大面積圖案化元件陣列，在8 × 8共64個元件中有超過93%的元件可正常工作，替快速製作大面積微米級圖案化元件陣列提供了一種新的製程方法。

摘要(英)

Spray-coated organic semiconductors such as conjugated polymer of poly[(9,9-dioctylfluorenyl-2,7-diyl)-co-bithiophene] (F8T2), small molecular of 6,13-bis(triisopropyl-silylethynyl)-pentacene (TIPS-PEN) and conjugated polymer of (selenophene-alt-3,6-dithophene-2-yl-2,5-bis-(2-hexyldecyl)-2,5 -dihydro-pyrrolo[3,4-c]pyrrole-1,4-dione) (PSeDPP) were constructed as organic field effect transistors (OFETs) on SiO2/Si substrate treated with various silanes or patterned silanes. The spray parameters and silanes selected were examined and corresponding morphologies of each organic semiconductors thin-film were systematically investigated while the OFETs were fabricated and characterized. After optimizing the condition used, F8T2 and TIPS-PEN could achieve hole mobility of 0.02 cm2 V-1 s-1 and 1.18 cm2 V-1 s-1 while PSeDPP could achieve hole and electron mobility of 5 cm2 V-1 s-1 and 1.13 cm2 V-1 s-1 simultaneously with on off current ratio of more than 102. Patterned OFETs array composed of 8 × 8 device layout on 4-inch Si wafer was also demonstrated with spray-coating approach and the percentage of devices worked successfully is exceeding 93%. As the result, the spray-coating process provides a new technique for fast manufacturing OFETs array in large-scale and compatible with the roll-to-roll process.

關鍵字(中)

★ 噴塗
★ 有機場效應電晶體
★ 有機薄膜電晶體
★ 共軛高分子半導體
★ 有機小分子半導體
★ 溶液法製程

關鍵字(英)

★ spray coating
★ organic field effect transistors
★ organic thin film transistors
★ conjugated polymers
★ small molecular semiconductors
★ solution process

論文目次

摘要 i
Abstract ii
目錄 iii
圖目錄 vii
表目錄 xv
第一章緒論 1
1-1 前言 1
1-2 有機場效應電晶體 2
1-2-1 電晶體結構 3
1-2-2 電晶體特性 4
1-3 有機半導體材料 7
1-3-1 非可溶性小分子 8
1-3-2 可溶性小分子半導體 11
1-3-3 可溶性共軛高分子半導體 13
1-4 單分子自組裝層 16
1-4-1 介電層表面改質 17
1-4-2 電極表面改質 23
1-5 有機薄膜製程 26
1-5-1 熱蒸鍍製程 26
1-5-2 溶液法製程 (Solution Process) 28
1-5-2-1 液滴塗佈法 29
1-5-2-2 旋轉塗佈法 31
1-5-2-3 剪力塗佈法 32
1-5-2-4 噴墨列印法 35
1-5-2-5 噴霧塗佈法 36
1-6 元件圖案化製程 38
1-6-1 遮罩法 39
1-6-2 表面能控制法 42
1-7 研究動機 45
第二章實驗方法 46
2-1 實驗藥品 46
2-1-1 有機高分子半導體 46
2-1-2 有機小分子半導體 46
2-1-3 不同官能基之矽烷 46
2-1-4 溶劑 47
2-2 實驗儀器及設備 47
2-3 基材前處理 49
2-3-1 晶圓清洗 49
2-3-2 單分子自組裝層製備 49
2-3-3 圖案化單分子自組裝層製備 50
2-4 有機半導體薄膜製備 53
2-4-1 噴塗有機小分子(TIPS-PEN)半導體薄膜 55
2-4-2 噴塗共軛高分子(F8T2)半導體薄膜 55
2-4-3 噴塗共軛高分子(PSeDPP)半導體薄膜 56
2-4-4 噴塗大面積圖案化之有機半導體薄膜 56
2-5 元件製備 57
2-6 元件電性量測 58
2-7 薄膜分析 58
2-7-1 光學顯微影像觀察 58
2-7-2 原子力顯微鏡分析 58
2-7-3 X光散射儀分析 59
第三章結果與討論 60
3-1 自組裝單分子層 60
3-2 有機小分子(TIPS-PEN)場效應電晶體元件 62
3-2-1 噴塗條件控制 63
3-2-2 未圖案化TIPS-PEN電晶體元件 66
3-2-3 圖案化TIPS-PEN電晶體元件 67
3-2-4 X光散射分析 72
3-3 共軛高分子(F8T2)場效應電晶體元件 73
3-3-1 未圖案化F8T2電晶體元件分析 74
3-3-1-1 光學顯微影像 74
3-3-1-2 原子力顯微影像分析 76
3-3-1-3 電性分析 77
3-3-2 圖案化F8T2電晶體元件分析 81
3-4 共軛高分子(PSeDPP)場效應電晶體元件分析 83
3-4-1 未圖案化PSeDPP電晶體元件分析 84
3-4-2 圖案化PSeDPP電晶體元件分析 85
3-4-3 大面積圖案化PSeDPP元件陣列 87
第四章結論及未來展望 89
第五章參考文獻 91

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指導教授

劉振良(Cheng-liang Liu)

審核日期

2015-7-27

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