移動刀具之遮罩式微電化學加工模擬與分析

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姓名

陳千蕙(Chien-Hui Chen) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

移動刀具之遮罩式微電化學加工模擬與分析
(Modeling and Analysis of Through-mask Electrochemical Micro-machining with a Moving Tool)

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摘要(中)

目前遮罩式微電化學加工的發展都僅於靜態加工，刀具的大小通常須與工件之加工區大小相同，然而，在電化學加工中，需選擇一導電性良好之金屬作為刀具電極，這樣的金屬通常要價不斐。基於成本考量，本文試著縮小刀具尺寸，給定刀具一移動速度，利用有限元素法創建移動刀具之遮罩式微電化學加工的電場模型，探討動態加工時的施加電壓、遮罩厚度、刀具移動速度等參數對加工形狀的影響。
　　由模擬結果顯示，在電壓越大時，加工深度越深，加工孔徑越大，且深寬比越佳；在遮罩厚度較薄時，電場分佈不均，側向腐蝕較為嚴重，工件中心會有島狀現象產生，這和遮罩的遮蔽性有關；在移動速度較慢時，相對加工時間較長，工件表面累積之電流密度越多，材料移除率越大；而隨著加工時間的增加，側向腐蝕速率會趨緩，使得深寬比漸佳。

摘要(英)

The development of through-mask electrochemical micro-machining is restricted in the static processing. The size of the tool needs to be the same as the processing zone. However, the electrode of the tool is required to be a good conductivity metal, which is expensive. Based on the cost, in this study, we try to reduce the size of the tool along with a moving speed. The electric field of through-mask electrochemical micro-machining with a moving tool is simulated by using finite element method. Effects of parameters, such as: applied voltage, mask thickness and moving speed etc…, on the resulted holes are investigated.
　　The simulation show that, as the voltage is increased, the machining depth is deeper, the hole diameter is bigger and the aspect ratio is higher. When the thickness of the mask is thinner, the electric field distribution is un-uniform and the lateral etching is higher. The island phenomenon will occur at the center of the workpiece. This is due to the shadow effect of the mask. When the moving speed is slow, the longer processing time causes more current density accumulated on the surface of the workpiece, such that the material removal rate is higher. As the processing time is increased, the lateral etching rate will become slow and the aspect ratio thus become better.

關鍵字(中)

★ 遮罩式微電化學加工
★ 有限元素法
★ 移動刀具
★ 模擬

關鍵字(英)

★ through-mask electrochemical micro-machining (TMEMM)
★ finite element method
★ moving tool
★ simulation

論文目次

摘要　i
Abstract　ii
致謝　iii
目錄　iv
圖目錄　vii
表目錄　ix
符號說明　x
第一章緒論　1
1-1 研究背景與動機　1
1-1-1 微電化學加工　3
1-1-2 遮罩式微電化學加工　4
1-2 文獻回顧　5
1-3 研究目的　10
第二章理論分析　12
2-1 基本理論　12
2-1-1 電流密度　13
2-1-2 電流分佈　14
2-2 極化　15
2-2-1 液相質傳動力學　15
2-2-2 極化現象　16
2-3 電解液導電度　18
2-4 電極直徑與加工時間之關係　19
2-5 底切與蝕刻因子　20
2-6 電化學加工之建模需求　21
第三章數值方法　23
3-1 有限元素法之電場分析　23
3-2 模型定義與假設　24
3-3 電化學反應式　25
3-4 模型建立　26
3-4-1 靜態遮罩式微電化學加工模型建立　27
3-4-2 動態遮罩式微電化學加工模型建立　27
3-5 二維電場模型　28
3-5-1 電場之統御方程式　28
3-5-2 靜態模型之電場設置　29
3-5-3 動態模型之電場設置　31
3-6 變形幾何模型　32
3-7 計算流程　33
第四章結果與討論　35
4-1 靜態模型結果分析　36
4-1-1 有無預設陽極之比較分析　36
4-1-2 預設陽極尺寸對加工的影響　37
4-2 動態模型驗證　39
4-2-1 網格密度測試　39
4-2-2 時間間距測試　40
4-3 電壓對加工形狀的影響　40
4-4 遮罩厚度對加工形狀的影響　43
4-5 刀具移動速度對加工形狀的影響　44
第五章結論　46
5-1 結論　46
5-2 未來展望　47
參考文獻　48

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指導教授

洪勵吾

審核日期

2016-7-12

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