兆聲波輔助化學溶液清潔晶圓表面汙染顆粒研究

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姓名

陳宥滕(You-Teng Chen) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

兆聲波輔助化學溶液清潔晶圓表面汙染顆粒研究
(Particulate Contamination Removal from the Wafer Surface Using Chemical Solution with Megasonic Waves)

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摘要(中)

晶圓表面上的微顆粒汙染是造成半導體元件製造良率下降的重要因素之一。清洗方法很多，一般利用超聲波震動(≦100kHz)所產生的空蝕作用(Cavitation)清洗所達到的效果較佳且破壞性較少，但當半導體元件精細度更高時使用超聲波清洗就容易有下列情況：(1)分布在表面上的線路遭空蝕氣泡破壞、(2)更小的隙縫、夾角處不易被清洗以及(3)不易清除更小的微顆粒，因此提出利用超高頻聲波/兆聲波(430kHz~980kHz)與改良自RCA SC1的低表面張力溶液作為清洗方法，其道理是利用提高頻率與調整溶液成分以獲得較小的空蝕氣泡、較強的聲場流(Acoustic Streaming)與降低黏滯邊界層(Viscous Boundary Layer)厚度。實驗利用田口法求得溫度、時間、輸入功率與頻率等參數對移除顆粒數量多寡與粒徑大小的影響，並進一步更改溶液配方來求得其他溶液與原配方溶液的差別。

摘要(英)

Particulate surface contamination is one of the major causes of low yields in the semiconductor. It is effective at removing surface contaminants without inflicting damage in cavitation implosion of ultrasonic cleaning (≦100kHz). But there are some situations for the more exact semiconductor device is cleaning by ultrasonic waves to cause: (1) the patterns of circulation are destroyed by cavitation implosion; (2) the smaller aperture and angle will be cleaned difficultly and; (3) it’s hard to remove the particles on the wafer surface. Thus, it will be presented that this clean method uses high frequency/megasonic waves aids the chemical solution of low surface tension from improving RCA SC1. It will obtain smaller cavitation bubbles, stronger acoustic streaming and to decrease viscous boundary layer by increasing frequency and decreasing surface tension of chemical solution. The different parameters will be confirmed to the effect of particle removal efficiency and particle size by Taguchi method in the experimental process. And compare the different solution with common solution.

關鍵字(中)

★ 兆聲波/超聲波
★ 田口法
★ 微顆粒移除
★ 聲場流
★ 空蝕作用

關鍵字(英)

★ Megasonic/ultrasonic
★ Taguchi method
★ Particle removal
★ Acoustic streaming
★ Acoustic cavitation

論文目次

摘要 I
Abstract II
目錄 III
圖目錄 V
表目錄 VII
第1章緒論 1
1.1 兆聲波晶圓清洗簡介 1
1.2 文獻回顧 3
1.3 研究方法與目標 6
第2章理論基礎 8
2.1溶液工作原理 8
2.1.1 RCA SC-1溶液的作用 8
2.1.2 有機溶劑的作用 8
2.2 水中兆聲波之物理及基本量 9
2.2.1 聲壓與聲場流 9
2.2.2 聲功率與聲強度 12
2.2.3 空蝕作用(Cavitation) 14
2.2.4 邊界層 16
2.3 微粒的黏附與剝除機制 18
2.3.1 黏附作用 18
2.3.2 剝除作用 19
2.4 實驗方法與因子設定 21
2.4.1 田口方法 22
2.4.2 配比設計原理 26
2.4.3 影響因子設定 27
第3章實驗 29
3.1 設備與材料 29
3.2 實驗流程 33
第4章結果分析 36
4.1 田口法實驗分析 36
4.2 實驗因子對微粒移除的作用關係 54
4.3 SC-1混合其他溶液後的清洗結果 57
第5章結論 60
參考文獻 61
附錄 64

參考文獻

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指導教授

曹嘉文、李雄(Chia-Wen Tsao Shyong Lee)

審核日期

2016-12-22

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