三維導電微成型技術開發應用於微機電系統之研究

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姓名

馮耀鋆(Yao-Yun Feng) 查詢紙本館藏

畢業系所

機械工程學系

論文名稱

三維導電微成型技術開發應用於微機電系統之研究

相關論文

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★ 單一自由度微型電熱鑷子之設計與分析	★ 加工液濁度檢測器之設計
★ Underwater Position Control of Particles	★ 立體微型振動發電機之研製
★ 用於電火花加工的油質感測器	★ 油液污濁度檢測器之設計與改良

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摘要(中)

本研究發展一套三維導電微成型系統，透過不同的導電材料，可與微米等級之微機電或機械加工後之結構進行整合，完成低粗糙表面、高機械強度、具高複雜性的微立體結構；以下，將介紹該製程完成相關微機電領域之應用(電磁式微發電機、電熱夾持器)。
首先以該製程搭配液態金屬，應用在以質量塊為作動機制之電磁式旋轉發電機上，完成具高複雜性線圈之繞製與佈線，整體發電機尺寸約為11×11×12 mm3輸出功率達20.3 μW；並由該製程搭配銀膠，在經微機電製程加工後的懸臂樑(尺寸為7 mm×7 mm×0.02 mm)上，製作單層及雙層線圈，完成微電磁式振動發電機之製作，以重複堆疊之方式降低其電阻提升輸出功率，最大輸出功率為82 nW；最後，經該製程搭配銀鎳膠，成功地應用在電熱式微夾持器上，利用矽基材與犧牲材料之組合，可一次性完成差異大且具橢圓截面積的U型對稱結構，並測試其機械與電性行為，結構總長約9 mm，可打開311 μm的間隙。

摘要(英)

Since the trend of the Internet and Industrie 4.0 technology in recent years, massive promoted Micro-electromechanical systems (MEMS) result in the increasing demand of the sensors application. Thus, improving the degree-of-freedom on the fabrication of micro structure has been in focus. Compared to the complex fabrication and low degree-of-freedom on the traditional MEMS-3D-structure, we develop a series fabrication method of conductive 3D direct-write structure, which integrates the different conductive materials and micro-scale MEMS-structure for the structure with low-roughness of surface、high-strength of mechanical、high-complexity. In the research, the application of this fabrication will be introduced such as micro electromagnetic energy generator, or miniaturized electro-thermal grippers.
The conductive 3D processing method is successfully utilized on the micro energy generators and micro actuators from the results. With different materials, we can design different dimensions, shapes and applications for the structure. With the benefits of workable in general environments, simple fabricating process, and wide range of material selection, we provide a better substitute option comparing to the traditional semi-conductor fabricating process.

關鍵字(中)

★ 導電立體製程
★ 微機電技術
★ 電磁式微發電機
★ 電熱式微夾持器

關鍵字(英)

★ conductive three-dimensional process
★ micro-electro-mechanical systems (MEMS)
★ micro-electro-magnetic generator
★ micro-electro-thermal gripper

論文目次

摘要 i
ABSTRACT ii
誌謝 iii
目錄 v
圖目錄 viii
表目錄 xiv
符號表 xv
第一章緒論 1
1-1 前言 1
1-2 研究目的與應用 2
1-3 微結構成型文獻 4
1-3-1 微結構成型 4
1-3-2 液態金屬成型 10
1-4 論文架構 12
第二章三維導電微成型技術 13
2-1 設備 13
2-1-1 液態金屬 13
2-1-2 導電膠 14
2-2 材料 15
2-2-1 液態金屬 15
2-2-2 導電膠 16
2-3 結構測試 17
第三章電磁式旋轉發電機之應用 20
3-1相關技術 20
3-2 理論與模擬 26
3-2-1 線圈轉速與感應電壓頻率關係 26
3-2-2 電磁感應發電基礎理論 26
3-2-3 線圈之感應電動勢 27
3-2-4 旋轉發電機模擬 31
3-2-5 模擬流程與方法 32
3-2-6 磁極設計模擬 35
3-2-7 線圈設計模擬 38
3-3 旋轉發電設計與製作 42
3-3-1 設計 42
3-3-2 製程 44
3-4 實驗結果 51
3-4-1 旋轉裝置 51
3-4-2 磁場量測 52
3-4-3 旋轉發電機量測(未封裝) 53
3-4-4 旋轉發電機量測(封裝) 58
3-5 昇壓儲能電路 63
3-5-1 多倍壓電路 63
3-5-2 儲能電路 66
3-5-3 實驗結果 68
3-6 討論與結論 72
第四章電磁式振動發電機之應用 73
4-1 相關技術 73
4-2 振動發電基礎理論 75
4-2-1 機械模型 76
4-2-2 電路模型 77
4-2-3 發電機結構總分析 78
4-3 振動發電機製程 80
4-4 振動發電實驗結果 82
4-4-1 量測架構 83
4-4-2 實驗結果 83
4-5 討論與結論 85
第五章電熱式夾持器之應用 87
5-1 研究動機 87
5-1-1 微致動器背景 87
5-1-2 相關技術 89
5-2 電熱夾持器基礎理論 92
5-2-1 電分析 93
5-2-2 熱分析 93
5-3 電熱夾持器製程 95
5-4 電熱夾持器實驗結果 97
5-4-1 量測架構 97
5-4-2 實驗結果 98
5-5 電熱夾持器模擬 101
5-5-1 原型結構模擬分析 101
5-5-2 寬厚度改變結構模擬分析 103
5-6 討論與結論 104
第六章結論與未來展望 107
6-1 結果與結論 107
6-1-1 旋轉電磁式發電機 107
6-1-2 振動電磁式發電機 108
6-1-3 電熱式夾持器 108
6-2 未來展望 110
參考文獻 111

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指導教授

陳世叡(Shih-Jui Chen)

審核日期

2018-8-21

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