利用火花電漿燒結法製備以矽為基底之奈米材料於熱電特性上之應用研究

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姓名

黃柏年(Bo-Nian Huang) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

利用火花電漿燒結法製備以矽為基底之奈米材料於熱電特性上之應用研究
(Si-based nanomaterials for thermoelectric applications by spark plasma sintering)

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摘要(中)

熱電效應是一種藉由材料本質特性，熱能跟電能之間可直接轉換的現象，在環保考量層面的價值很高。熱電效應的應用層面廣泛，廢熱的回收再利用發電，亦可以和太陽能發電系統相互輔助，或是在外太空探索中使用，甚至應用於行動裝置的能源回收。因此科學家近年致力於開發綠色能源，提升ZT優值。本研究主要探討以輕摻雜矽晶片蝕刻出的矽奈米線為基底，進行N/P type摻雜，以及鎂熱反應形成的矽化鎂，並混合二氧化矽奈米粉末與鈷奈米粉末，利用火花電漿燒結法燒結成塊材。量測範圍為室溫至470K，討論不同混合材料對熱電結果之影響。

摘要(英)

Thermoelectric effect can be employed for waste heat recycling, power
generation, chip cooling, or space exploration. However, the cost for materials
with the high figure of merit (ZT) at room temperature is still over the price.
This study focused on the doped silicon-based thermoelectric materials,
including Si and magnesium silicide formed by magnesium thermal reaction.
Mixing of the silicon dioxide and cobalt nano-powder before sintering were
conducted to study its effects on ZT from room temperature to 470K.

關鍵字(中)

★ ZT優值
★ 矽奈米線
★ 火花電漿燒結法
★ 熱電

關鍵字(英)

★ ZT
★ silicon nanowires
★ spark plasma sintering
★ thermoelectric

論文目次

摘要 ............................ i
Abstract ........................ ii
致謝 .............................. iii
目錄 ............................ iv
圖目錄 .......................... vi
第一章、導論 ....................... 1
1-1 前言 .......................... 1
1-2 熱電效應 ...................... 2
1-3 文獻回顧 ...................... 6
1-4 研究動機 ...................... 9
第二章、實驗方法與儀器量測 .................... 10
2-1 金屬輔助化學蝕刻法（Metal-assisted chemical etching, MACE） ........................... 10
2-1-1 一步金屬輔助化學蝕刻法(One-step MACE) .......................... 10
2-1-2 二步金屬輔助化學蝕刻法(Two-step MACE) .......................... 12
2-2 火花電漿燒結法(Spark Plasma Sintering，SPS) ............................... 13
2-3 儀器量測 ......................... 14
2-3-1 電導率量測 ..................... 14
2-3-2 Seebeck係數量測 ................... 19
2-3-3 熱導率量測 ........................ 19
2-3-4 材料性質分析 ........................ 24
2-3-4-1 X光繞射分析(X-ray diffraction，XRD) ................................. 24
2-3-4-2 掃描式電子顯微鏡(Scanning Electron Microscopy，SEM) ..............................25
第三章、實驗流程與步驟 ................... 27
3-1 前言 ............................... 27
3-2 實驗流程設計 ....................... 28
3-3 實驗步驟 ........................... 29
3-3-1 製備矽奈米線 ..................... 29
3-3-2 N/P type參雜 .................... 30
3-3-3 鎂高溫熱反應 ..................... 31
3-3-4 收集矽奈米線及粉末混合 ................ 31
3-3-5 塊材燒結成形與研磨 .................... 32
第四章、實驗結果與討論 ...................... 40
4-1 前言 ................................. 40
4-2 SEM觀察分析 ............................. 41
4-2-1 蝕刻矽奈米線 .......................... 43
4-2-2 燒結塊材 ............................ 43
4-3 塊材之XRD分析 ......................... 46
4-4 塊材之電導率 ........................... 49
4-5 塊材之Seebeck係數 ....................... 50
4-6 塊材之功率因子 .......................... 50
4-7 塊材之熱導率 ............................ 51
4-8 塊材之ZT值 .............................. 52
第五章、結論 ................................ 60
參考文獻 .................................. 61

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指導教授

辛正倫(Cheng-Lun Hsin)

審核日期

2016-10-12

推文