博碩士論文 104256003 詳細資訊




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姓名 陳柏翰(Po-Han Chen)  查詢紙本館藏   畢業系所 光電科學與工程學系
論文名稱 短波紅外線之陣列型濾光片設計
(Array filter for short wave infrared applications)
檔案 [Endnote RIS 格式]    [Bibtex 格式]    至系統瀏覽論文 (2020-2-1以後開放)
摘要(中) 本論文主旨為在短波紅外線(Short Wave Infrared, SWIR)波段內用馬賽克(mosic)排列方式製作出一片具有四種窄帶濾光功能的陣列濾光片,若將此濾光片結合640 X 512像素焦平面感測器(focal-plane array (FPA) image sensor),將可在SWIR波段內即時呈現出四種對應的影像將可提供軍事偵察、穿透煙霧環境影像及夜視之功能。
四窄帶陣列濾光片的中心波長分別為905nm、950nm、1055nm、1550nm,經光學薄膜設計出所需膜層後,運用微影曝光製作出圖案,藉由雙電子槍離子助鍍鍍膜機製作薄膜,經重複四次微影、鍍膜完成後再加入金屬遮光層來避免不需要的波段穿透濾光片的陣列縫隙,即完成四窄帶陣列濾光片的製作。
摘要(英) This paper aimed to design and fabricate an optical device with four narrow-band-pass filters arrange by using a mosaic array pattern of the different wavelength range in SWIR(Short Wave Infrared). When the filter were bundled on a SWIR image sensor of 640X512 in resolution pixels, the four images of the different wavelength can be analyzed at the same time for the application of military surveillance, seeing through foggy and smoggy environment and night vision.
The central wavelengths of these four narrow-band-pass filters are 905nm, 950nm, 1055nm, and 1550nm, respectively. The fabrication of the filters were using a dual electric gun deposition system with ion assisted deposition after the lithography process. Repeating four times of lithography and deposition process and black matrix coating, the optical device processes were completed.
關鍵字(中) ★ 陣列型濾光片 關鍵字(英)
論文目次 第一章 緒論1
1-1 前言1
1-2 國內外相關研究2
1-3 陣列型濾光膜簡介3
1-4 短波紅外線(SWIR)應用5
1-5 研究動機7
第二章 實驗原理與技術8
2-1 微影技術原理8
2-2 陣列型微影架構設計10
2-3 帶通濾光片設計11
2-4 陣列型帶通濾光片製作流程17
第三章 實驗設備與量測儀器20
3-1 雙電子束鍍膜機(E-gun) 20
3-2 曝光機(MA6) 23
3-3 表面輪廓儀(DEKTAK 6M) 24
3-4 光譜儀(U-4100) 25
第四章 實驗結果與分析26
4-1 產品製作流程26
4-2 微影製程28
4-2-1 光阻塗佈控制28
4-2-2 曝光與顯影製程參數28
4-2-3 微影成品量測29
4-3 光學鍍膜製程31
4-3-1 單層膜測試31
4-3-2 多層膜測試35
4-3-3 陣列型濾光片與多層膜組合39
4-3-4 製作中的異常與分析45
4-4 短波紅外線(SWIR)測試50
第五章 結論與未來展望51
參考文獻52
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[8] “多光譜相機” http://www.teo.com.tw/prodDetail_print.asp?id=1295
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[12]“SWIR Image Gallery” http://www.sensorsinc.com/gallery/images
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[16] “What is SWIR?”http://www.edmundoptics.com/technical-resources -center/imaging/what-is-swir
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[18] C. P. Lo, D. A. Quattrochi, and J. C. Luvall, “Application of high-resolution thermal infrared remote sensing and GIS to assess the urban heat island effect,” INT. J. remote sensing, vol. 18, no. 2, pp. 287-304, 1997.
[19]郭倩丞,“電子束蒸鍍機的原理與應用” http://www.rndc.ntut.edu.tw/ezfiles/22/1022/img/558/167590410.pdf
[20] “MA/BA6 Mask and Bond Aligner”
https://www.suss.com/tw/products-solutions/products/mask-aligner/maba6/overview.html
[21] “微光電實驗室- Dektak” http://www.ncu.edu.tw/~osc/3_1_2.htm
[22] “儀器設備介紹- U-4100”
http://140.116.205.97/demo/wp-content/uploads/2015/08/71c1d8bf4b59143db9ef7938358c59c5.pdf
[23]李正中,“薄膜光學與鍍膜技術(第七版)”藝軒圖書出版社
[24] “真空鍍膜的不良分析”http://cddaxin.com/show-102-136-1.html
指導教授 陳昇暉 審核日期 2017-1-23
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