博碩士論文 104323077 詳細資訊




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姓名 高健閔(Chien-Min Kao)  查詢紙本館藏   畢業系所 機械工程學系
論文名稱 基於雙光子聚合技術之長軸成形法製造高深寬比結構
(Longitudinal Forming Method for Fabrication of High Aspect Ratio Structure based on Two-photon Polymerization Technology)
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摘要(中) 傳統的雙光子聚合(Two-photon Polymerization, TPP)微製造技術藉由體素中較小的徑向尺寸使空間解析度可達到次微米等級。透過積層製造的方法,該技術可製作出任意且複雜外形的微結構。然而TPP微製造技術擁有如此高的空間解析度,勢必要犧牲掉整體的製造速度。對於數百微米高以上的微結構,一旦製造時間拉長,製造失敗的風險也將被大幅提升。對此本研究提出新穎的長軸成形法(Longitudinal Forming Method, LFM),使用本實驗室開發的四軸微製造系統將玻璃基板旋轉90°,即可採用線掃瞄的方式,利用體素中較長的軸向尺寸快速製造微結構。本研究設計出適用於LFM的基板載台,藉由觀察其製造的微結構外形改進LFM實驗製程。透過固定平台移動速率並改變雷射功率製作微結構,使用掃瞄式電子顯微鏡觀察各結構的尺寸,觀察結果可作為本實驗製造參數的資料庫。本論文最後利用LFM僅需10秒即可製作出高100μm、深寬比16之微結構。
摘要(英) Convention two-photon polymerization(TPP) micro-manufacturing technology could reach high spatial resolution with sub-micro level by the smaller lateral size of a voxel. Through the fabrication mechanism from additive manufacturing, TPP could realize arbitrary and complex shape of micro-structure. Therefore, it must be a trade off between high spatial resolution and total fabrication speed. As fabrication time became longer, risk about structure failure would also be enlarged. To improve this condition, the Longitudinal Forming Method(LFM) was proposed to fabricate micro-structures rapidily. Applying the homemade four-axis micro-manufacturing system allowed the glass substrate to be rotated by 90°, and the longer longitudinal size could be utilized with line scanning method. The appropriate substrate holder were designed, and the shape of structures made by the holders was observed to improve the manufacturing process. Size of structures, fabricated at fixed motion stage speed and different laser power, was measured by Scanning Electron Microscope(SEM), and the database of fabrication parameter was established through the measurement result. Finally, the research spent only 10 seconds realizing the structure with 100μm height and aspect ratio of 16.
關鍵字(中) ★ 雙光子聚合
★ 長軸成形法
★ 高深寬比
關鍵字(英) ★ Two-photon Polymerization
★ Longitudinal Forming Method
★ High Aspect Ratio
論文目次 摘要 I
ABSTRACT II
誌謝 III
目錄 IV
圖目錄 VI
表目錄 IX
符號說明 X
第一章 緒論 1
1-1研究背景 1
1-2雙光子微製造技術之文獻回顧 3
1-3高深寬比結構製造之文獻回顧 8
1-4研究動機與目的 13
1-5論文架構 16
第二章 理論說明 17
2-1雙光子吸收光致聚合反應 17
2-2雙光子微製造之特徵尺寸 20
2-3雙光子微製造系統架構與加工流程 27
第三章 研究方法 34
3-1雙光子微製造技術之長軸成形法 34
3-2雷射輸出功率對結構尺寸影響之實驗方法 42
3-3高深寬比結構製作之實驗方法 44
3-4光敏樹酯調配 45
第四章 實驗結果與討論 48
4-1長軸成形雙光子微製造之微結構品質改善策略 48
4-2雷射輸出功率對結構尺寸影響之實驗結果 52
4-3高深寬比結構製作之實驗結果 58
第五章 結論與未來展望 61
5-1結論 61
5-2未來展望 61
參考文獻 63
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指導教授 廖昭仰(Chao-Yaug Liao) 審核日期 2017-10-17
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