In this thesis, we will propose a method of optical field calculation to accurately calculate for collimated light source. The solution using the point source approximation method is not suitable for non-far-field conditions. Therefore, this provides an algorithm to a single light source of Illuminance and irradiance distribution. A light spread function (LSF) that is composed of a two-term Gaussian function from the nonlinear least squares method will be utilized to fit the illuminance and irradiance distribution of each extended source on the target plane. The LSF can calculate the illuminance and irradiance distribution at the regional position on the target plane, and the LSF also calculates the distance for different target planes so that the LSF can reach the regional result optimization from the target plane.
A result of using the algorithm, it is possible to quickly know the LSF of each ratio from the target plane (D) and the light source diameter (S), we call D/S Ratio, and then perform the multi-light source algorithm , this can get a more complete regional results.The UV-LED multi-light source of collimation for the main discussion, because the UV-LED multi-light source of collimation used in the exposure machine will need a very harsh environment, after the white LED multi-light source of collimation for practical experimental verification, the following the best solution of the thesis.
The UV-LED multi-light source of collimation is used, the number of light sources is 10 stars of Single row, and the range of the observation point L = 320mm and the D / S Ratio = 7, we can find that the maximum. The best uniformity can be obtained by the best degree of uniformity of 94.1%. The optimum uniformity of the distance between the light source and the light source d = 35mm, and under the same conditions, the optical simulation software to obtain uniformity of 94.9%, and the results of the calculation is very small difference.
The white LED multi-light source of collimation is used, the number of light sources is 5 stars of Single row, and the range of the observation point L = 180mm and the D / S Ratio = 10, we can find that the maximum. The best uniformity can be obtained by the best degree of uniformity of 95.2%, and under the same conditions, the optical simulation software to obtain uniformity of 94.2%, the experimental results to obtain uniformity of 90.2%.
 Jay Lee, Behrad Bagheri,Hung-An Kao,”A Cyber-Physical Systems architecture for Industry 4.0-based manufacturing systems”, Manufacturing Letters 3 , pp.18–23,2015.
 S.A.Prahl,M.Keijzer,S.L.Jacques,A.J.Welch,”A Monte Carlo Model of Light Propagation in Tissue”, SPIE Institute Series Vol. IS 5,pp.102-111,1989.
 Heinrich Kirchauer, “Photolithography Simulation”, chapter.2.5,Institute for Microelectronics, TU Vienna ,1998
 Sergio Lopera Aristizabal ; Giuseppe Antonio Cirino ; Arlindo Neto Montagnoli ; Aparecido Arruda Sobrinho ; Jose Benaque Rubert ; Michel Hospital ; Ronaldo Domingues Mansano, “Microlens array fabricated by a low-cost grayscale lithography maskless system”, SPIE Optical Design And Engineering, Opt. Eng. 52(12), 125101, 2013.
 Kuo, Shin-Hong, and Chi-Feng Chen. “Design of direct LED backlighting based on an analytical method of uniform illumination”, Journal of Display Technology, pp. 1089 - 1096,2016.
 Williamson, S J and Cummins, H Z,“Light and Color in Nature and Art”, Wiley,pp.173, 1983
 Franklin A.Graybill,Hariharan K.Iyer, “REGRESSION ANALYSIS: Concepts and Applications”, chapter9,Nonlinear Regression.
 Douglas C.Montgomery,Cheryl L.Jennings & Murat Kulahci. “Introduction to time series analysis and forecasting”. John Wiley & Sons. pp. 67-69,2015.
 R.R. Dammel, Diazonaphthoquinone-based Resists, Bellingham, WA: SPIE Optical Engineering Press, Vol. TT-11, (1993).
 Jin-Jia Chen ; Chin-Tang Lin. “Freeform surface design for a light-emitting diode–based collimating lens”. Optical Engineering, Vol. 49(9), pp. 093001-093001,2010.
 NICHIA corporation NCSU276A UV-LED Detailed : https://www.nichia.co.jp/specification/products/led/NCSU276A-E.pdf
 “Discover the Unprecedented Design Freedom Offered by Silicone Optics, High-Performance Optical Silicones for Lamp and Luminaire Applications,Dow Corning Lighting Solutions”, Form No. 11-3639-01,2016.
 CreeR XLampR XP-G LEDs, Product family data sheet, CLD-DS20 Rev 15C, http://www.cree.com/led-components/media/documents/XLampXPG.pdf