整合填充型水洗技術於潔淨室外氣空調箱 以去除酸鹼氣態分子污染物之研究

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徐文瑞(Wen-Jui Hsu) 查詢紙本館藏

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環境工程研究所在職專班

論文名稱

整合填充型水洗技術於潔淨室外氣空調箱以去除酸鹼氣態分子污染物之研究
(Application of Air washer of Make-up Air Units to Remove Acidic and Basic Gaseous Melecular Pollutants)

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摘要(中)

摘要(中)
在高科技生產廠房，由於製程的進步及晶圓製程線徑的微小化，對於生產環境的需求已從要求粒狀污染物進而要求氣態分子污染物(Airborne Molecular Contaminant, AMC)的濃度標準。對潔淨室外氣空調箱(Make-up Air Unit, MAU)利用空氣洗滌器(Air Washer)加濕方式，同時去除大氣中的氣態分子污染物中二氧化硫(SO2)、氨(NH3)，藉由水對於二氧化硫、氨等氣體為良好的溶劑，進而提升此類污染物的去除效率。目前應用在加濕上使用的空氣洗滌器(Air Washer)大都採用噴淋水洗的方式，將其搭配填充型洗滌塔，便可將加濕器有效運用於去除AMC，所以填充型洗滌塔的填充材料型式，便為影響去除效率的一項重要參數。
本研究探討洗滌塔的填充材料分別為立體結構型填充物及SUS304交叉絲網，其於不同的水質條件下，對二氧化硫(SO2)及氨(NH3)的去除效率，實驗發現：SUS304交叉絲網循環水水質控制在30 μS/cm時對於二氧化硫及氨的最高去除效率分別為68%及93%，出口濃度可維持在2 μg/m3以下。將循環水水質控制在10 μS/cm時，對於二氧化硫及氨的最高去除效率可分別提昇至79%及97%。當填充材料為立體結構型填充材料時，其填充層厚度為SUS304交叉絲網的三分之一，即可達到與SUS304交叉絲網相同的去除效率，所以使用立體結構型填充材料，可縮短空氣洗滌器(Air Washer)的建置空間，進而增加生產機台的設置，有效提升企業的的競爭力及獲利。

摘要(英)

摘要(英)
Airborne molecular contamination (AMC) is chemical contamination in the form of vapors or aerosols, that and has a detrimental effect on a product or a process. The main sources of AMC in cleanrooms are the ambient environments, process chemicals, emissions from tools emissions, and construction materials. With the increased production of semiconductor devices in the sub-100 nm range, a Abating AMC has become a crucial element of cleanroom management as the production phase of semiconductor devices marches deep into sub-100-nm range. Make-up air units (MAUs) are air- handling units that provide purified outside air to cleanrooms. An The air washer of in an MAU is a piece of equipment that is designed to remove contamination by scrubbing the outside air that moves through it. Internal packing in the packed a tower of air washers provides a large wetted contact surface area to induce intimate contact between for the contaminated gas and the scrubbing liquid.
This study evaluated the removal performance of SO2 and NH3 by in a tower of packing of air washers with that used SUS304 wire netting and structured-interlaced monofilament as internal packing material. It is found The results showed that one third a tower packeding with depth of structured- interlaced monofilament can achieve the same removal performance as a tower packed with SUS304 wire netting, but at one-third the packing depth. This is due to because the packing material of used in the structured-interlaced monofilament could facilitated the breakup of the liquid phase and created the maximum surface area for mass transfer with in the vapor phase. Using structured-interlaced monofilament packing material, would considerably reduce the volume of the air washer could be reduced largely, and thereby actuvate increasing the working space of the factory.

關鍵字(中)

★ 氣態分子污染物
★ 外氣空調箱
★ 空氣洗滌器
★ 洗滌塔填充材

關鍵字(英)

★ AMC
★ MAU
★ Air Washer
★ packing material

論文目次

目錄
第一章前言 ............................................1
1.1 研究緣起 ............................................1
1.2 研究目的 ............................................3
第二章文獻回顧 .........................................5
2.1 氣態分子污染物介紹 ..................................5
2.2 潔淨室氣態分子污染物對製程的影響 ......................6
2.2.1 製程環境對氣態分子污染物的控制要求 ..................7
2.2.2 國內潔淨室環境常見酸鹼污染氣體 ......................9
2.2.3 外氣空調箱酸鹼氣態分子污染物來源探討 ...............10
2.3 Air Washer 去除 AMC 的相關技術探討 .................11
2.3.1 液氣比與水霧粒徑對去除效率的探討 ..................14
2.3.2 吸收液水質對於去除效率的影響 ......................15
2.4 SO2 及 NH3 的物理化學特性與吸收理論 .................16
2.4.1 吸收原理 .........................................16
2.4.2 質傳與溶解度 .....................................17
2.4.3 填充式洗滌塔 .....................................19
第三章研究方法 ........................................24
3.1 研究流程 ...........................................24
3.2 實廠外氣空調箱 Air Washer 設計及操作條件 ............26
3.2.1 外氣空調箱 Air Washer 的操作條件及說明 ............27
3.2.2 循環水使用水質要求 ...............................27

3.2.3 填充材料的型式 ...................................29
3.2.4 使用噴嘴型式及條件 ...............................30
3.3 採樣分析的方法 .....................................32
3.3.1 採樣流程與分析實驗室處理程序 ......................32
3.3.2 採樣器具及分析儀器概述 ............................33
3.4 Kya(氣相總質傳係數)值計算 ..........................37
第四章結果與討論 ......................................38
4.1 洗滌循環水水質與去除效率的探討 ......................38
4.2 污染物濃度對去除效率的影響 ..........................40
4.3 不同填充材料的去除效率探討 ..........................41
4.4 不同操作條件及填充材料的氣相總質傳係數(Kya)值比較 .....42
4.5 SO2 處理效率提升與填充高度關係探討 ...................46
第五章結論與建議 ......................................49
5.1 結論 ..............................................49
5.2 建議 ..............................................50
參考文獻 ..............................................51 附錄一 ................................................54 附錄二 ................................................62
附註一採樣分析流程圖 .............................69
附註二所參考分析方法之主要數據 ....................70
附註三 ...........................................71
附錄三 ................................................72

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指導教授

蕭大智(Ta-Chih hsiao)

審核日期

2017-7-20

推文