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姓名	盧冠為(Kuan-Wei Lu)  查詢紙本館藏	畢業系所	能源工程研究所
論文名稱	利用電漿聚合膜提升光學薄膜與塑膠基板之附著性 (Improvement of Adhesion between Optical Film and Plastic Substrate by Using Plasma Polymerization Film)
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摘要(中)	光學元件應用於日常生活中許多電子產品當中，而攜帶式電子產品輕量化的需求日益增加，塑膠基材的使用也顯得更加重要。但由於光學元件製作時，薄膜在塑膠基板上始終有附著性的不足。本實驗引入含高表面自由能之材料，利用電漿聚合技術鍍製高分子聚合膜，並鍍上光學薄膜材料二氧化矽(SiO2)，探討各製程步驟對基板與光學薄膜之間附著性的改善原因。 本實驗使用PMMA、330R、480R、PC等四種光學級塑膠作為基材，在電漿蝕刻處理後，可使接觸面積增加並提升機械咬合力，表面粗糙度最大可提升至61.9 nm。經電漿表面前處理之後，其表面官能基活化產生羥基(–OH)，可由水接觸角量測得知水接觸角最低可至超親水(低於10度)，表示表面自由能的提升；前處理之持久性不佳，故鍍製具有含氮官能基的高分子聚合膜，可更有效提升其表面自由能，並且可由XPS觀察鍍製前後含氮百分比之上升，最高提升至2.25倍。經上述所有步驟後鍍上光學薄膜，雖然蝕刻無法提升所有基板之附著性，但沉積聚合膜後，四種基板皆達到完整無脫膜的效果，並良好保持基板與光學薄膜之光學性質。
摘要(英)	Optical components are used in many electronic products in daily life. The demand for lightweight and portable electronic products is increasing, therefore, the use of plastic substrates becomes important. However, the insufficient adhesion on plastic substrates has been a serious problem of the production of optical components. In this experiment, a material with high surface free energy is introduced to deposit a polymer film by using plasma polymerization technique. The optical thin film material silicon dioxide (SiO2) was coated to investigate the improvement of the adhesion between the substrate and the optical film in each process step. In the research, four plastic material, PMMA, 330R, 480R and PC, are used as substrates. The etching process has been adopted to increase the contact area. The surface roughness can be increased up to 61.9 nm. After plasma pretreatment on the substrate surface, the hydroxyl group are activated. The water contact angle can be measured less than 10 degrees, indicating that the surface free energy has been improved. Due to the poor persistent of the hydroxyl group, the polymer film with nitrogen-containing function groups is coated, which can improve the surface free energy more effectively. The increasing of the percentage of nitrogen can be observed by XPS. After the above steps, the optical films are coated. Although etching process cannot improve the adhesion of all the substrates, the four substrates achieve completely adhesion after depositing the polymer film. Besides, the optical property of the substrates is well maintained.
關鍵字(中)	★ 電漿聚合膜 ★ 塑膠基板 ★ 附著性 ★ 光學薄膜	關鍵字(英)
論文目次	摘要 i Abstract ii 致謝 iv 目錄 v 圖目錄 viii 表目錄 xi 第一章 緒論 1 1-1 引言 1 1-2 實驗目的 3 1-3 研究內容 4 1-4 本文架構 5 第二章 基礎理論及文獻回顧 6 2-1 電漿 6 2-1-1 電漿的產生 6 2-1-2 電漿聚合 8 2-1-3 高分子膜聚合反應 11 2-2 薄膜沉積原理 13 2-2-1 電漿輔助化學氣相沉積 13 2-2-2 物理氣相沉積 14 2-3 附著力 15 2-3-1 粗糙度 16 2-3-2 表面自由能 17 2-4 表面能與水接觸角之關係 18 第三章 實驗方法及使用儀器設備 20 3-1 實驗流程 20 3-2 實驗介紹及步驟 21 3-2-1 實驗介紹 21 3-2-2 實驗步驟 21 3-3 實驗鍍膜系統 26 3-3-1 有機單體 26 3-3-2 光學薄膜選擇 27 3-3-3 實驗基板 28 3-3-4 實驗鍍膜系統 31 3-3-5 離子源系統 32 3-3-6 電子槍蒸鍍 34 3-4 實驗量測儀器 36 3-4-1 電漿光譜儀(OES) 36 3-4-2 可見光-近紅外光分光光譜儀 38 3-4-3 原子力學顯微鏡(AFM) 39 3-4-4 接觸角量測儀(CA) 41 3-4-5 百格刀 42 3-4-6 光學顯微鏡(OM) 44 3-4-7 X射線光電子能譜儀(XPS) 45 第四章 結果與討論 48 4-1 未處理基板之附著性 49 4-2 粗糙度對附著性的影響 51 4-3 表面能對附著性的影響 (前處理與電漿聚合膜) 53 4-3-1 電漿光譜 53 4-3-2 前處理對附著性的影響 56 4-3-3 電漿聚合膜對附著性的影響 59 4-3-4 XPS分析 61 4-3-5 高分子聚合膜對附著性之影響 63 4-4 光學性質 65 4-5 總結比較 67 第五章 結論 69 參考文獻 70
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指導教授	曹嘉文 郭倩丞	審核日期	2018-7-30
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