鉬氧化物/銀多層薄膜應用於雲母基微型固態超級電容器

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陳云甄(Yun-Jhen Chen) 查詢紙本館藏

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材料科學與工程研究所

論文名稱

鉬氧化物/銀多層薄膜應用於雲母基微型固態超級電容器
(All-Solid-State Micro-Supercapacitors Based on Mica Substrates with MoOx/Ag Multilayers electrodes)

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摘要(中)

隨著時代演變，科技快速進步，全球對環境與能源日益重視，在可再生能源及其裝置的發展上更加迫切。超級電容器擁有優異的功率密度與儲電能力，能提供高速充放電速率且循環壽命長，其中微型超級電容器由於可以和MEMS和CMOS集成，進一步研發為透明可撓性超電容更能在穿戴型裝置等作有效運用，引起了廣泛的研究興趣。
本研究以濺鍍MoOx/Ag多層薄膜為活性物質製備指叉式微型固態超級電容器，為了嘗試透明可撓性，也有製作可撓性基板的試片，基板選用耐高溫、抗酸鹼的天然雲母片；石墨稀當集電極以維持其透光度和導電性。指叉結構組態(指叉總數、間隙、寬度及長度)、活性物質MoOx/Ag多層薄膜的厚度參數的選定由矽基板的試片電化學性質、循環穩定性和體積比電容等多面向考慮，由電化學交流阻抗分析證實了由於銀薄膜的摻入，MoOx金屬氧化物之低導電率的缺陷得到有效的改善，使得其體積比電容與能量和功率密度遠高於基於MoOx單層薄膜結構的指叉式微型固態超級電容器，且其體積比電容隨著銀摻入的量增而逐漸增加。活性材料的高導電性對於金屬氧化物的擬電容是否能實現高的比電容以及功率和能量密度至關重要，為了探討元件經過充放電循環後，活性材料性質的改變，本研究對兩種基板上的多層MoOx/Ag薄膜進行各種電性及材料分析。

摘要(英)

With the scientific and technological advancements, the society which we live is facing the energy and environmental related problems such as pollution, deficiency of fossil fuels, and global warming. In order to resolve these issues, green-energy and renewable materials as well as their devices are demanded. Supercapacitors (SCs) exhibit high specific capacitance and power density, fast charge-discharge rate, and long cycle life. In addition, they are safe in operation and environmental friendly. Recently, micro-supercapacitors (MSCs) have attracted much interests since they can be further integrated into MEMS and CMOS.
In this study, we prepared all solid-state micro-supercapacitor by sputtering MoOx/Ag multilayers film as active material. We also tried natural mica flakes for substrate,which are transparent and flexible. It can also resistant to high temperature, acid and alkali. The configuration of the interdigitated structure and the thickness of the active material MoOx/Ag film are considered by their electrochemical properties, cycle stability and volumetric capacitance. It is confirmed by impedance analysis that the low conductivity defect of MoOx was effectively improved due to the incorporation of silver film. It makes its volumetric capacitance, energy and power density much higher than MoOx single-layer film.
The conductivity of the active material is essential for the high specific capacitance, power and energy density of pseudocapacitor. In order to investigate the changes in the properties of active materials after the charge and discharge cycles, various electrical and material analyses were performed on the multilayered MoOx/Ag films of the two substrates.

關鍵字(中)

★ 超級電容器
★ 擬電容
★ 金屬氧化物
★ 材料分析
★ 電化學
★ 儲能元件

關鍵字(英)

★ Supercapacitor
★ Pseudocapacitor
★ Metal oxide
★ Material analysis
★ Electrochemistry
★ Energy storage device

論文目次

摘要……………………………………………………………………………I
Abstract……..……………………………………………………II
目錄…………………………………………………………………………IV
圖目錄……………………………………………………………………VIII
表目錄………………………………………………………………………X
第一章緒論…………………………………………………………1
1.1 前言…………………………………………………………………1
1.2 基本原理與文獻回顧………………………………3
1.2.1 超級電容器簡介……………………………………3
1.2.2 超級電容器之儲能機制………………………4
1.2.2.1 電雙層電容器……………………………………4
1.2.2.2 擬電容器………………………………………………6
1.2.2.3 混合電容器 ………………………8
1.2.3 超級電容器之電極材料………………………9
1.2.3.1 碳系材料………………………………………………9
1.2.3.2 過渡金屬氧化物/氫氧化物…………9
1.2.3.3 導電高分子…………………………………………10
1.2.4 超級電容器之電解質……………………………11
1.2.5 微型透明可撓式超級電容器………………12
1.2.6 超級電容器之電化學原理與技術…………14
1.2.6.1 循環伏安法 ……………………………14
1.2.6.2 恆電流充放電法………………………………………15
1.2.6.3 電化學交流阻抗………………………………………16
1.3 研究動機與目的…………………………………………………18
第二章實驗內容與方法…………………………………………19
2.1 實驗藥品及材料……………………………………………………19
2.2 製程與分析儀器……………………………………………………20
2.2.1 雷射光罩製作系統(Laser Direct Write Image System)………….................................20
2.2.2 旋轉塗布機(Spin Coater)………………………20
2.2.3 光罩對準曝光機(Mask Aligner)……………20
2.2.4 高真空電子束暨熱阻式蒸鍍系統(E-gun & Thermal Evaporation System)…………………………………………………21
2.2.5 射頻與直流磁控濺鍍機(RF&DC Magnetron Sputtering)…………...................................21
2.2.6 紫外光臭氧清洗機(UV-Ozone Stripper)………22
2.2.7 恆電位儀(Potentiostat)…………………………………………22
2.2.8 四點探針電阻量測儀(Four-point probe)………23
2.2.9 X射線光電子能譜(X-Ray Photoelectron spectroscopy, XPS)……….........................................23
2.2.10 高效能可變溫多功能X光繞射儀(D8 Discover X ray Diffraction System)………………………………………………………………24
2.2.11 掃描式電子顯微鏡(Scanning Electron Microscopy, SEM)…….........................................24
2.2.12 掃描穿透式電子顯微鏡(Scanning Transmission Electron
Microscopy, STEM)………………………………………………….......25
2.2.13 雙束型聚焦離子束顯微鏡(Dual Beam Focus Ion Beam, DB-FIB) ………………………………………………………………………………........25
2.3 實驗流程…………………………………………………………………......26
2.4 實驗製程………………………………………………………………….......27
2.4.1 指叉圖形結構與組態之設計……………………………………..27
2.4.2 對照組試片製備…………………………………………………......28
2.4.3 黃光微影 …………………………………………………………......28
2.4.4 製備集電極………………………………………………………........28
2.4.5 製備活性物質……………………………………………………........29
2.4.6 掀離製程 ………………………………………………………….......30
2.4.7 製備固態電解質…………………………………………………........30
2.4.8 製備指叉式微型固態超級電容器………………………………...30
2.4.9 製備雲母基微型固態超級電容器…………………………………..31
第三章實驗結果與討論……………………………………………………......32
3.1 材料分析…………………………………………………………………..........32
3.1.1穿透式電子顯微鏡分析(TEM)………………………………………...32
3.1.2 X射線光電子能譜分析(XPS)………………………………………...35
3.1.3低掠角X光繞射分析(GIXRD)……………………………………….....42
3.1.4片電阻量測(Sheet resistance)…………………………………………42
3.3.5穿透率量測(Transmittance)…………………………………………...43
第四章結論…………………………………………………………………...........44
第五章參考文獻……………………………………………………………..........45

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指導教授

李勝偉(Sheng-Wei Lee)

審核日期

2018-8-23

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