博碩士論文 105521007 詳細資訊




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姓名 陳冠宇(Guan-Yu Chen)  查詢紙本館藏   畢業系所 電機工程學系
論文名稱 P型金屬氧化物與硫化物合金薄膜之研究
(P-type metal oxide and sulfide alloy film)
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摘要(中) 近年來,軟性電子的出現,其具備輕、薄、大面積以及能捲曲等優點,不僅攜帶方便,更能符合人因工程,使得穿戴式電子產品愈來愈普及,而電子元件微型化也變得更為重要,元件朝著輕、薄、透明發展成了一種未來的趨勢,現今常用的透明導電薄膜(如:ITO)仍然存在著一些缺點,開發新的材料成了一項重要的課題。
本論文將著重於p-type氧化鋅靶材的製備及對其薄膜進行探討分析,並同時開發新的p-type導電材料,如(Cu,Zn)S合金靶材,利用冷壓燒結的方式製造其靶材,並對靶材及其薄膜進行量測分析,期望以本實驗之結果對開發新型p-type導電材料做出貢獻。
摘要(英) In recent years, the emergence of flexible electronics has been accompanied with advantages such as lightness, thinness, large area, and ability to be curled. Flexible electronics is not only portable but also cause to human factors engineering, making wearable electronic products more and more popular and turning the miniaturization of electronic components a lot. It is important that components develop toward light, thin and transparent and become the trend of future. The common transparent conductive films (such as ITO) still have some shortcomings, and the innovation of new materials has become an essential issue.

This study focuses on the preparation of p-type zinc oxide target and thin film as well as the development of other new conductive materials, including (Cu,Zn)S alloy target and thin film. The (Cu,Zn)S alloy target is manufactured by cold-press , and the target and its thin film are measured and analyzed. It is expected that the results of this experiment will serve the new p-type conductive material as the contribution.
關鍵字(中) ★ P型金屬氧化物
★ 硫化物合金
★ 透明導電氧化物薄膜
★ 氧化鋅
★ 硫化鋅
★ 硫化銅
關鍵字(英) ★ P-type metal oxide
★ Sulfide alloy
★ Transparent Conducting Oxide film
★ ZnO
★ ZnS
★ CuS
論文目次 目錄
摘要 i
Abstract ii
致謝 iii
第一章 緒論 1
1-1 前言 1
1-2 研究動機 2
第二章 理論基礎與實驗方法 3
2-1 氧化鋅摻雜 3
2-2 酸鹼中和與化學共沉澱法 3
2-3 冷壓燒結法 4
2-4 熱壓燒結法 6
2-5 硫化製程 7
第三章 實驗流程與實驗儀器介紹 8
3-1 P型氧化鋅靶材製作與鍍膜 8
3-2 (Cu,ZnS)靶材製作與鍍膜 15
3-3 實驗儀器 18
第四章 實驗結果分析 27
4-1 P型氧化鋅靶材量測分析 27
4-2 P型氧化鋅濺鍍薄膜量測分析 29
4-3 P型氧化鋅雷射沉積薄膜量測分析 32
4-4 (Cu,Zn)S合金靶材量測分析 33
4-5 (Cu,Zn)S合金濺鍍薄膜量測分析 34
4-6 (Cu,Zn)S合金雷射沉積薄膜量測分析 36
4-7 結論與未來展望 37
參考文獻 39
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指導教授 辛正倫(Cheng-Lun Hsin) 審核日期 2018-7-23
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