增點式立方體網格開發及其在三維半導體元件模擬

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姓名

王麗棠(Li-Tang Wang) 查詢紙本館藏

畢業系所

電機工程學系

論文名稱

增點式立方體網格開發及其在三維半導體元件模擬
(Development of point-added cube element and its application to Semiconductor Device Simulation)

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摘要(中)

在本篇論文中，我們使用C語言，建立一套可以精確模擬半導體元件之網格，其為增點式立方體網格。我們發現在傳統立方體網格在不同接面方向上會造成誤差，為此我們設計此一新的網格。接著使用簡易電阻做理論計算，並與模擬值結果比較來驗證，確認此新式網格的可行性。最後，將增點式網格應用在二極體、圓弧接面及內含氧化區塊之半導體，並將這些應用做理論的推導與程式模擬結果做比較分析，所有模擬證實此增點式網格的可靠度。

摘要(英)

In this thesis, we use C language to develop a new point-added cube element for 3D device simulation. We found that the traditional cube element cause errors due to the low accuracy. For this reason we design a point-added cube element. We compared the traditional cube element with the point-added cube element. A simple resistor will be used to verify our result with theoretical value. Finally, we applied the point-added cube element to PN diodes and 3D semiconductor including an internal oxide block. The simulation results match the theoretical derivation.

關鍵字(中)

★ 增點式立方體網格開發
★ 導體元件模擬

關鍵字(英)

論文目次

摘要 .................................................... i
Abstract ............................................... ii
目錄 .................................................. iii
圖目錄 ................................................. iv
表目錄 ................................................. vi
第一章簡介 ........................................... 1
第二章三維網格與等效電路模型分析..................... 3
2-1. 三維網格之程式架構與分析........................ 3
2-2. 四面體模組之電場推導............................ 7
2-3. 四面體模組之電子及電洞流推導.................... 12
2-4. 立方體網格與增點式網格結構定義.................. 15
第三章增點式網格與立方體網格之模擬與驗證 17
3-1. 增點式網格與立方體網格之比較與分析............... 17
3-2. 增點式網格與立方體網格之電阻模擬................. 19
3-3. 增點式網格與立方體網格電阻模擬產生之誤差分析..... 21
3-4. 增點式網格之PN二極體模擬分析.................... 25
第四章增點式網格三維之應用與驗證....................... 29
4-1. 管狀電阻理論推導................................. 29
4-2. 管狀電阻模擬與驗證............................... 32
4-3. 內嵌氧化層之電阻驗證............................. 36
第五章結論 ............................................ 39
參考文獻 ................................................. 41

參考文獻

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指導教授

蔡曜聰

審核日期

2018-7-26

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